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Rule Based Validation of Processing Sequences

Hansen U., Germer C., Büttgenbach S., Franke H-J, TU Braunschweig, DE
In conventional mechanical engineering the development of a product is influenced only little by the specific requirements of the fabrication processes. When looking at the domain of micro mechanical devices this circumstance is no longer [...]

Numerical Investigations of Laser Induced Crystallization and Stress Development in Phase Change Electroceramic Materials

Pirch N., Baldus O., Waser R., Kreutz E.W., RWTH Aachen, DE
Barium-Strontium-Titanate, BST, in the stoichiometry Ba0.7Sr0.3TiO3 to Ba0.5Sr0.5TiO3 is been considered as a promising candidate to enter into the DRAM manufacturing technology. The incompatibility between the temperatures required to crystallize the ferro/para-electric layer into the [...]

Simulation Based Design of O2 MEMS Sensor

Andjelic Z., Krippner P., Vogel A., ABB Corporate Research Center, DE
The paper presents the methodology for the Simulation Based Design (SBD) of MEMS sensors influenced by mechanical and electromagnetic phenomena. The complexity of the problems mostly asks for both the efficient 3D numerical technologies and [...]

Implementation of a Nonlinear Control Law for the Magnetostrictive Beam Vibrations by an Amplifier of Current to Current

Bereksi G.S., Center of Advanced European Studies and Research, DE
In this work, we start by giving a weak formulation of an ampli er of current to current network model and some estimations for the electrical current using graph theory. These estimations are interpreted in [...]

Simulation of Electrical Field Induced Particle Transfer

Hoffmann R., Wachutka G., Océ Printing Systems, DE
The controlled transfer of charged, densely distributed polymer particles across narrow air gaps is one of the basic mechanisms in modern printing technology. To understand the detachment and transport of charged particles by an electric [...]

Capillary Forces in Micro-Fluidic Self-Assembly

Greiner A., Lienemann J., Korvink J.G., Xiong X., Hanein Y., Böhringer K.F., IMTEK, Albert Ludwig University, DE
Parallel self-assembly in the fluidic phase is a promising alternative technique to conventional pick-and-place assembly. In this work the hydrophobic-hydrophilic material system between binding sites for microparts is simulated with respect to alignment precision. The [...]

Optimization of a Micro Actuator Plate Using an Evolutionary Algorithm and Simulation Based on Discrete Element Methods

Quinte A., Jakob W., Scherer K.P., Eggert H., Forschungszentrum Karlsruhe, DE
Within the framework of the OMID joint project (1999 - 2002) funded by the BMBF, a universal, fluidically driven actuator plate is being developed in cooperation with the project partners of Bartels Mikrotechnik GmbH and [...]

Simulation of a Micro Dispenser Using Lumped Models

Koltay P., Moosmann C., Litterst C., Streule W., Zengerle R., University of Freiburg, DE
In this paper the modelling of a micro dispenser by system simulations according to fluidic network theory is reported. The dispensing device under consideration (the so called “Nano-Jet” dispenser) is described in detail in [1]. [...]

Physically-Based Damping Model for Highly Perforated and Largely Deflected Torsional Actuators

Sattler R., Schrag G., Wachutka G., Münich University of Technology, DE
We propose a mixed level simulation scheme for squeeze film damping (SQFD) effects in microdevices, which enables the inclusion of damping effects in system level models of entire microsystems in a natural, physical-based, and flexible [...]

Modelling Free Jet Ejection on a System Level – An approach for microfluidics

Koltay P., Moosmann C., Litterst C., Streule W., Birkenmeier B., Zengerle R., University of Freiburg, DE
Fast simulation of complex microfluidic systems requires consideration of network simulations based on lumped models as an alternative to standard computational fluid dynamic (CDF) simulations. In this paper we describe an analytical model of an [...]

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