Papers:
Modeling of Electrostatic MEMS Components
This paper describes an analytical approach for the network-type modeling of pull-in comb drives based on a mathematical field description using conformal mapping methods. The model was coded in MAST R for the SABER R [...]
A Common Basis for Mixed-Technology Micro-System Modeling
An ad hoc working group, organized under the DARPA Composite CAD program, is developing a common set of VHDL-AMS (VHSIC Hardware Description Language for Analog and Mixed Signal) definitions for modeling mixed-technology systems. This common [...]
MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis
We have developed an interactive computer-aided design program that supports mechanical design of devices fabri-cated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and [...]
Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS
Dewey A., Dussault H., Hanna J.P., Christen E., Fedder G.K., Romanowicz B.F., Maher M.A., Duke University, US
This paper presents an approach to defining and characterising component models that promotes the establishement of reusable intellectual property (IP) for microelectromechanical systems (MEMS), in particular, and composite microsystems, in general. System dynamic behavior is [...]
MEMS Component Extraction
Surface micromachined structures are composed of atomic elements like anchors, beams and fingers, which can be further grouped into components like springs, comb drives and plates. Automatic recognition of these elements and com-ponents is crucial [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6