MEMS Functional Validation Using the Configuration Space Approach to Simulation and Analysis

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We have developed an interactive computer-aided design program that supports mechanical design of devices fabri-cated in surface micro-machining processes. The program automates kinematic analysis via a novel configuration space computation code, performs real-time simulation, and sup-ports functional parametric design. Designers can visualize system function under a range of operating conditions, can find and correct design flaws, and can optimize performance. We used the program to detect and correct a design flaw in a micro-mechanical indexing mechanism fabricated at Sandia with the SUMMiT process.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 136 - 138
Industry sector: Sensors, MEMS, Electronics
Topics: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6