Energy-Based Characterization of Microelectromechanical Systems (MEMS) and Component Modeling Using VHDL-AMS

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This paper presents an approach to defining and characterising component models that promotes the establishement of reusable intellectual property (IP) for microelectromechanical systems (MEMS), in particular, and composite microsystems, in general. System dynamic behavior is mathematically characterized as coupled sets of ordinary algebraic and differential equations (DAEs), using the basic laws of conservation of energy governing electrical and mechanical networks combined with branch constitutive relations (BCRs) governing network elements. The ordinary algebraic and differential equations are described in the behavioral analog hardware description language (AHDL) VHDL-AMS, using a common modeling methodology and associated set of constructs. An example composite system model is given of an electromechanical loudspeaker.

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Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 139 - 142
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6