The sensor's operating principle consists in measuring the resistance variations of a thin semiconductive layer heated between 250 and 450?C as a function of the nature and quantity of the molecules adsorbed on its surface. [...]
, Camon, H.
, Dilhan, M.
, Djafari-Rouhani, M.
, Gué, A.M.
, Jammes, B.
, LAAS/CNRS, FR
The development of microsystems has shown that the technologies and tools are mature enough to investigate the possibilities of complete CAD tools, as is the case in integrated circuit design. An oxygen sensor has been [...]
, Páhi, A.
, Poppe, A.
, Rencz, M.
, Székely, V.
, Technical University of Budapest, HU
Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topics: Chemical, Physical & Bio-Sensors