Papers:
System Issues in Arrays of Autonomous Intelligent Sensors
This paper considers some of the systems level issues of concerned when building of large scale sensing systems composed of a large number of autonomous intelligent sensors. The work is motivated by the potential offered [...]
Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators
Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]
Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching
This paper explores a novel technique for monitoring film thickness in reactive ion etching that incorporates a micromachined sensor. The prototype sensor correlates film thickness with the change in resonant frequency that occurs in the [...]
GEMS: A Revolutionary System for Environmental Monitoring
Manobianco D.M., Manobianco J., Evans R.J., Pister K.S.J., Manobianco D.M., Manobianco J., ENSCO, Inc., US
This paper describes a revolutionary, new observing system designed for environmental monitoring that will integrate MicroElectroMechanicalSystems (MEMS) and nanotechnologies. The concept, known as Global Environmental MEMS Sensors (GEMS), features an integrated system of airborne probes [...]
Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force
Xiao Z., Sun Y., Li B., Lee S., Sidhu K.S., Chin K.K., Farmer K.R., New Jersey Institute of Technology, US
We have investigated the effect of natural frequency shift in single-crystal silicon, rectangular, electrostatic torsion actuators due to the electrostatic force. The electrostatic actuator was fabricated by using ultra-thin silicon wafer, SU-8 thermal compression bonding, [...]
Electrostatic Tuning of a Micro-Ring Gyroscope
Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK
This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]
Macromodel of Intelligent Sensor Structure with Accelometer
The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There [...]
Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor
Proper CAD design of electronic microsystems oriented for environment monitoring requires accurate models of various sensors, which would be compatible with the existing behavioral simulators. In this paper the analysis of the ion sensitive transistor [...]
Smart, Intelligent and Cogent Microsensors – Intelligence for Sensors and Sensors for Intelligence
The paper develops a terminology to describe sensors which have been enhanced in some way by the integration of some additional processing circuitry. Several terms, current in the literature, including 'smart sensors' and 'intelligent sensors' [...]
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 1
Published: March 7, 2004
Industry sector: Sensors, MEMS, Electronics
Topics: MEMS & NEMS Devices, Modeling & Applications, Sensors - Chemical, Physical & Bio
ISBN: 0-9728422-7-6