Numerics, Algorithms – TechConnect Briefs

The Atomic Limit of Finite Elements in the Simulation of Micro-Resonators

Rudd R.E., University of Oxford, UK

We describe developments in the coupling of length scales methodology which allows the simulation of the dynamic and temperature dependent behavior of sub-micron Micro-Electro-Mechanical Systems (MEMS). This novel technique accurately models the behavior of the [...]

3D Simulations of Ultra-Small MOSFETs: The Role of the Short Range Coulomb Interactions and Discrete Impurities on Device Terminal Characteristics

Gross W.J., Vasileska D., Ferry D.K., Intel Corporation, US

We have developed a three-dimensional particle based simulator with a coupled molecular dynamics routine that avoids the "double-counting" of the long-range portion of the Coulomb force. As opposed to drift-diffusion based simulators, the Monte Carlo [...]

Robust Algorithms for Boundary-Element Integrals on Curved Surfaces

Wang X., Newman J.N., White J.K., Massachusetts Institute of Technology, US

This paper presents a new approach to computing 1/r singularities on curved panels. By using carefully chosen mapping techniques, a curved panel with curved edges is mapped to a at panel with straight edges. Analytical [...]

A Quadratic Method for Nonlinear Model Order Reduction

Chen Y., White J.K., Massachusetts Institute of Technology, US

In order to simulate and optimize effciently systems which include micromachined devices, designers need dynamically accurate macromodels for the those devices. Although it is possible to develop such macromodels by hand, it would be vastly [...]

A Novel Approach for Determining Pull-In Voltages in Micro-electro-mechanical Systems (MEMS)

Long D.S., Shannon M.A., Aluru N.R., University of Illinois at Urbana-Champaign, US

In this paper we introduce a novel method, based on the Lagrange Multiplier Method (LMM), for calculating pull-in voltages in MEMS. This method combines the finite-element with a displacement constraint and boundary element method. The [...]

Nonlinear Analysis of Electrostatic Actuation in MEMS with Arbitrary Geometry

Taschini S., Baltes H., Korvink J.G., ETH-Hoenggerberg, CH

We present an explicit formulation for the Jacobian (or tan-gent) matrix of the discretized non-linear model for a cou-pled electromechanical system. The Jacobian matrix, consisting of the derivatives of the residual, is needed in Newton-Raphson-based [...]

Mathematical Analysis of Electrostatically Actuated MEMS Devices

Bernstein D., Guidotti P., Pelesko J.A., California Institute of Technology, US

We perform a rigorous mathematical analysis of a simple membrane based model of an electrostatiacallyh actuated MEMS device. Using both analytical and numerical techniques, we prove the existence of a fold in the solution space [...]

Reduced-Order Models of Stress-Stiffened MEMS Structures

Varghese M., Rabinovich V.L., Senturia S.D., Massachusetts Institute of Technology, US

We present a process for generating reduced-order models for stress-stiffened MEMS structures. The models are created using the established CHURN process, which uses non-linear, analytic, energy functions to describe the state of each conservative quasi-static [...]

Co-simulation and Optimization Micro Electro Mechanical Systems by Using Method of Theoretical Investigation

Mkrttchian V., State Engineering University of Armenia, AM

Before elaboration and designing of micro electromechanical systems (MEMS) it is very important to carry out an appropriate computer modeling for analyzing and optimizing. To describe adequately the physical phenomenon talking place in MEMS it [...]

Finite Element Based Electrostatic-Structural Coupled Analysis with Automated Mesh Morphing

Zhulin V.I., Owen S.J., Ostergaard D.F., ANSYS, Inc., US

A co-simulation tool based on finite element principles has been developed to solve coupled electrostatic-structural problems. An automated mesh morphing algorithm has been employed to update the field mesh after structural deformation. The co-simulation tool [...]

A Novel Approach to Simulate the Potential at the Center Axis of Poisson’s Equation in Cylindrical Coordinates for Plasma Immersion Ion Implantation Processes

Kwok D.T.K., Zeng Z.M., Chu P.K., City University of Hong Kong, CN

A novel and practical method is developed to resolve the three dimensional Poisson’s and Laplace’s equation at the center axis in cylindrical coordinates. The method employs the rectangular xyz co-ordinates to solve the potential f [...]

Nonlocal Problems in MEMS Device Control

Pelesko J.A., Triolo A.A., Georgia Institute of Technology, US

Perhaps the most ubiquitous phenomena associated with electrostatically actuated MEMS devices is the "pull-in" voltage instability. In this instability, when applied voltages are increased beyond a certain critical voltage there is no longer a steady-state [...]

Closed-Loop, Neural Network Controlled Accelerometer Design

Gaura E.I., Ferreira N., Rider R.J., Steele N., Coventry University, UK

In this paper, a closed-loop, smart transducer design is proposed, based on artificial neural network (ANN) techniques. The design aims to improve the performance of open-loop, off-the-shelf capacitive acceleration sensors and increase their robustness to [...]

A Mathematical Model for Process Control in Laser Chemical Vapor Deposition

Nassar R., Dai W., Zhang C., Lan H., Maxwell J., Louisiana Tech University, US

Laser chemical vapor deposition is a free form technique capable of producing high aspect ratio microstructures of arbitrary shape. The process does not yet have a high resolution required for microfabrication. For this study, we [...]

Discrete Impurity Effects in Silicon Quantom Dots

Milicic S.N., Vasileska D., Akis R., Gunther A., Goodnick S.M., Arizona State University, US

We have developed efficient self-consistent 3D Schrodinger-Poisson solver to model the energy level spectrum in silicon quantum dots. We find that the energy level spectrum in the dot can be easily tuned by varying the [...]

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