Papers:
A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations
It is well known that MEMS based microfluidic devices operate in very low Reynolds number regime (Re < 1). Analysis and design of such microfluidic devices requires the solution of incompressible viscous fluid flow or [...]
Coupling of Length Scales and Atomistic Simulation of a MEMS Device
We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately [...]
Automated Solid Model Extraction for MEMS Visualization
A software tool has been developed to enable the rapid generation of solid models for MEMS structures. The automated 3-dimensional model extraction (3DMX) software, together with a description of a MEMS process, is capable of [...]
Energy-Based Solution Method for the Global Behavior of Diaphragms Under Pneumatic and Electrostatic Pressure
In this paper, an approximate analytical solution is presented for the diaphragm's deflection based on energ minimization. through the use of a polynomial solution technique. Thanks to this method. we obtain not onlY the center [...]
A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems
In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that [...]
Nodal Analysis for MEMS Design Using SUGAR v0.5
This paper presents the development of a simulation program (SUGAR) for planar MEMS devices. The approach is based on nodal analysis to solve coupled nonlinear differential equations. The current version SUGAR vO.5 can perform DC, [...]
Implications of Finite Time Stepping for Transient Sensor Models
Modeling of sensor devices has to take into account not only variable voltaves and currents but also variable device parameters. This makes transient differentiation and integration more complex than for circuits with constant device characteristics. [...]
Coupling of FEM Programs for Simulation of Complex Systems
A method is presented which couples single task FEM programs, mesh generators and other utility programs to solve complex systems. By this method we are connecting the FEM programs with special Script Interpreter programs and [...]
Coupled Electro-Mechanical Simulation of Integrated Micro-Electro-Mechanical Systems
Micro-electro-mechanical systems equipped with active devices (iMEMS) are commonly employed in sensor applications. In this paper, simulation of the mechanical and electrical properties of a deformable structure containing an integrated MOS sensor is described.
MEMS Design Optimization Using Coupled FEM and Electrical Circuit Simulation
The FEM (Finite Element Method) package ANSYS includin`, the CFD (Computational Fluid Dynamics) module FLOTRAN was coupled with the electrical network simulator HSPICE for the comprehensive design of microsystems. The coupling permits the simultaneous optimization [...]
A 3D Mesh Generation Method for the Simulation of Semiconductor Processes and Devices
We present an extended quadtree-octree mesh generation method which is well suited for semiconductor process and device simulation. The method can handle complicated geometries and moving boundaries. In order to describe boundaries and trace boundary [...]
Dispersive Media in FDTD-Comparison of Recursive Convolution and Auxiliary Differential Equation Methods
A new, efficient algorithm for modelling dispersive media in Finite Difference Time Domain (FDTD) methods is presented. It is based on the Auxiliary Differential Equation (ADE) formulation. Accuracy and efficiency are compared to other ADE [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1998 International Conference on Modeling and Simulation of Microsystems
Published: April 6, 1998
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-96661-35-0-3