On Statistical Variation of MOSFETs Induced by Random-Discrete-Dopants and Random-Interface-Traps

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Abstract – In this work, we statistically study characteristic fluctuation of 16-nm-gate high-/metal gate (HKMG) MOSFETs by random-discrete-dopants (RDDs) inside silicon channel and random-interface-traps (RITs) at high-k/silicon interface. Randomly generated devices with three-dimensional (3D) RDDs [...]

Functionalization of self-organized networked SiOxHyCz nano-islands deposited by atmospheric pressure microwave plasma torch on Au/Si(100) substrates patterned by nano-indentation

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A coaxial injection microwave excited plasma torch operating at atmospheric pressure is applied to synthesizing SiOxHyCz nano-islands from hexamethyldisiloxane precursor on prepatterned Au/Si(100) substrates.Prior to the PECVD deposition, the substrates are patterned by nano-indentation. SEM [...]