Functionalization of self-organized networked SiOxHyCz nano-islands deposited by atmospheric pressure microwave plasma torch on Au/Si(100) substrates patterned by nano-indentation

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A coaxial injection microwave excited plasma torch operating at atmospheric pressure is applied to synthesizing SiOxHyCz nano-islands from hexamethyldisiloxane precursor on prepatterned Au/Si(100) substrates.Prior to the PECVD deposition, the substrates are patterned by nano-indentation. SEM [...]