Papers – Page 15 – TechConnect Briefs

Microsphere templating as means of enhancing the sensitivity of thin film metal-oxide gas sensors

Rothschild A., Kim I-D, Hyodo T., Tuller H.L., Massachusetts Institute of Technology, US

Chemical and physical synthesis routes were combined to prepare macroporous thin films of semiconducting metal-oxides such as SnO2, TiO2, ZnO, and CaCu3Ti4O12 by reactive sputtering or pulsed laser deposition onto polymethylmethacrylate and polystyrene microsphere templated [...]

Design and Fabrication of Flexible OTFT Array by using Nanocontact Printing

Jo J., Kim K-Y, Lee E-S, Esashi M., Korea Institute of Machinery and Materials(KIMM), KR

The high-resolution and large-area flexible OTFT array to use as a driving device for an OLED was designed and fabricated in the nanocontact printing process and organic thin films could be deposited even in a [...]

Novel PDMS stamp for imprint lithography

Maeng I.S., Samsung Electro-mechanics Co. Ltd., KR

New PDMS/epoxy composite material which has sufficent mechanical strength is used as a stamp for the imprinting lithography. Its fabrication procedure, and the imprinting results using this stamp will be discussed.

Nanowire formation for Single Electron Transistor using SEM Based Electron Beam Lithography (EBL) Technique: Positive Tone Vs Negative Tone E-beam Resist

Nuzaihan M., Hashim U., Halim N.H.A., Bajuri S.N.M., Northern Malaysia University College of Engineering, MY

Experimental studies of nanowires formation are carried out. The nanowires are fabricated using Scanning Electron Microscope Based Electron Beam Lithography (EBL) Technique with critical dimensions in less than 100nm. In order to complete the design [...]

High-density Optical Disk Mastering Using Electron Beam Lithography with Modified LIGA Demolding Mechanism

Chao C.H., Pan C.T., National Sun Yat-Sen University, TW

In the study, a spiral nano-groove with 110nm in linewidth and 80nm in depth has been successfully fabricated. This method, Optical disk mastering using electron beam lithography, could provide about 50Gbytes storage capacity and is [...]

Fabrication of Periodic Sub-100nm Patterns in SiO2 Template by Electron-beam Lithography

Chen A., Chen P., Chua S.J., Chen A., Chen P., Singapore-MIT Alliance, National University of Singapore (NUS), SG

We report on the fabrication process of SiO2 templates with periodic sub-100nm air hole patterns using electron beam (e-beam) lithography followed by reactive ion etching (RIE). Two-dimensional periodic air holes with sub-100nm dimensions were defined [...]

Scalable Fabrication of Polymeric and Organic Nanomaterials using Particle Replication in Non-wetting Templates (PRINT) and Imprint Lithography

Maynor B.W., Denison G.M., Rolland J.P., DeSimone J.M., Liquidia Technologies, US

We have developed scalable, “top-down” nanofabrication methodologies for the fabrication of polymeric and organic nanostructures for nanobiotechnology and materials engineering. These techniques use novel perfluoropolyether (PFPE) elastomers that possess superior nanoimprinting properties, including error-free nanoscale [...]

Empirical analysis of metrological data fusion for dose control on nano scale lithography

Chu M.M., Chou J.H., National Cheng Kung University, TW

Recently, the immersion lithography has added extra disturbing factor, such as bubbles, particles which directly impact on current in-line metrology and dose control performance. Several works has reported the potential bubble effect.This study concentrates the [...]

Replication of Highly-Hydrophobic Surface with Micro/Nano Combined Structures from Nature

Lee S.M., Kwon T.H., Pohang University of Science and Technology, KR

A highly-hydrophobic film has successfully been fabricated by simply replicating plant leaf surface with micro/nano combined structures. A plant leaf was used as a master to make a mold by nickel electroforming. The positive polymer [...]

Dip Pen NanolithographyTM: Nanofabrication and Nanoscale Assembly – Top Down Nanostructures and Bottom Up Nanobio

Haaheim J., NanoInk Inc, US

Precision nanoscale deposition is a fundamental requirement for much of current nanoscience research. Further, depositing a wide range of materials as nanoscale features onto diverse surfaces is a challenging requirement for nanoscale processing systems. Dip [...]