Sensors – Chemical, Physical & Bio – Page 32

Modeling and Practial Verification of the Ionophore Based Chemically Modified Field Effect Transistor

Daniel M., Szermer M., Janicki M., Napieralski A., DMCS, Technical University of Lodz, PL

Proper CAD design of electronic microsystems oriented for environment monitoring requires accurate models of various sensors, which would be compatible with the existing behavioral simulators. In this paper the analysis of the ion sensitive transistor [...]

Macromodel of Intelligent Sensor Structure with Accelometer

Husak M., Jakovenko J., Kulha P., Novak J., Janicek V., Czech Technical University in Prague, CZ

The paper describes conceptual approach to the design of a tilt structure determined for integration on a chip. An accelerometer for measurement of inclination in x and y axes is used as a sensor. There [...]

Electrostatic Tuning of a Micro-Ring Gyroscope

Gallacher B.J., Hedley J., Burdess J.S., Harris A.J., Rickard A., King D., Insat University of Newcastle, UK

This paper describes a procedure for identifying and correcting anisoinertia and anisoelasticity present in a micro-ring gyroscope. The major disadvantages of popular tuning methods such as mass trimming using laser ablation or focussed ion beam [...]

Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force

Xiao Z., Sun Y., Li B., Lee S., Sidhu K.S., Chin K.K., Farmer K.R., New Jersey Institute of Technology, US

We have investigated the effect of natural frequency shift in single-crystal silicon, rectangular, electrostatic torsion actuators due to the electrostatic force. The electrostatic actuator was fabricated by using ultra-thin silicon wafer, SU-8 thermal compression bonding, [...]

GEMS: A Revolutionary System for Environmental Monitoring

Manobianco D.M., Manobianco J., Evans R.J., Pister K.S.J., Manobianco D.M., Manobianco J., ENSCO, Inc., US

This paper describes a revolutionary, new observing system designed for environmental monitoring that will integrate MicroElectroMechanicalSystems (MEMS) and nanotechnologies. The concept, known as Global Environmental MEMS Sensors (GEMS), features an integrated system of airborne probes [...]

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching

Morris B.G., May G.S, Georgia Institute of Technology, US

This paper explores a novel technique for monitoring film thickness in reactive ion etching that incorporates a micromachined sensor. The prototype sensor correlates film thickness with the change in resonant frequency that occurs in the [...]

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

Dong Y., Kraft M., University of Southampton, UK

Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]

System Issues in Arrays of Autonomous Intelligent Sensors

Newman R.M., Gaura E.I., Conventry University, UK

This paper considers some of the systems level issues of concerned when building of large scale sensing systems composed of a large number of autonomous intelligent sensors. The work is motivated by the potential offered [...]

Smart MEMS and Sensor Systems

Microsensors, Arrays and Automatic Diagnosis of Sensor Faults

Gaura E., Newman R.M., Coventry University, UK

As man-made dynamical systems become increasingly complex, there is an ever-present need to ensure their safe and reliable operation [1]. These requirements extend beyond the normally accepted safety-critical systems (e.g. nuclear reactors, chemical plants, and [...]