Sensors – Chemical, Physical & Bio – Page 21

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US

This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation

Lyshevski S.E., Rochester Institute of Technology, US

This paper examines and demonstrates a possible mechanism of sensing weak magnetic fields in biosystems.

Development of Active Systems for Military Utilization

Zunino III J.L., Lim H.C., US Army ARDEC, US

The US Army is transforming into a lighter yet more lethal “objective force”, all while fighting wars in the Middle East. Therefore, advanced technologies and materials are being developed and integrated into current and future [...]

A 20 µm Movable Micro Mobile

Jeon J., Lee J.B., Kim M-J, The University of Texas at Dallas, US

We present design, fabrication, and characterization of an extremely small (20x14 µm) movable 3D micro vehicle. The micro mobile was fabricated using a combination of focused-ion-beam (FIB) for micro/nano parts production, atomic layer deposition (ALD) [...]

Microsystems on their Way to Smart Systems

Heinze L., VDI/VDE Innovation + Technik GmbH, DE

This paper will deal with two core questions: 1. The evolution of Microsystems towards Smart Systems. 2. How will the development of Smart Systems influence the future of Microsystems Technologies (MST)? Overall from the development [...]

Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction

Pietrzak P., Pekoslawski B., Makowski M., Napieralski A., Technical University of Lodz, PL

The main factor that determines the cost of vibration-based condition monitoring system of large rotating machines is the unitary price of the piezoelectric sensors, commonly used in such devices. Silicon microaccelerometers can be considered as [...]

Pressure sensor data processing for vertical velocity measurement

Husak M., Jakovenko J., Stanislav L., Czech Technical University in Prague, CZ

There are design and realization of a sensor system for vertical velocity measurement using pressure sensor in the paper. Problem of nonlinearity due to the exponential function of air pressure versus altitude is discussed in [...]

Building Micro-Robots: A path to sub-mm3 autonomous systems

Reid J.R., Vasilyev V., Webster R.T., US Air Force Research Laboratory, US

A process for fabricating sub-cubic millimeter, fully autonomous micro-robots is presented. Details of the process flow and intial prototype structures are demonstrated. In addition, the design of an electrostatic actuator array for moving the robot [...]

MEMS Pressure Sensor Array for Aeroacoustic Analysis of the Turbulent Boundary Layer on an Airplane Fuselage

Krause J.S., White R.D., Moeller M.J., Gallman J.M., De Jong R., Tufts University, US

This paper describes a front venting MEMS pressure sensing array, fabricated through the MEMSCAP PolyMUMPS process. The microphone array will be used to analyze the turbulent boundary layer (TBL) of an airplane fuselage in wind [...]

Contact-free Handling of Metallic Submicron and Nanowires for Microelectronic Packaging Applications

Fiedler S., Zwanzig M., Jäger M.S., Böttcher M., Fraunhofer Institute for Reliability and Microintegration, DE

Individual submicron particles produced by non-lithographic techniques can be attractive for future microelectronic applications. Their touchless manipulation is a necessary prerequisite to use them, since they are too small to be handled via Pick&Place. We [...]