Modeling & Simulation of Microsystems – Page 49

Triboelectromagnetic Phenomena at a Simulated Material Combination of a Head/Magnetic-Recording-Disk

Nakayama K., Mechanical Engineering Laboratory, JP

The head slider of a magnetic recording apparatus is currently covered with a diamond like carbon (DLC) film, while the magnetic recording layer of the disk is overcoated with hydrogenated carbon film (HCF). The head [...]

Automatic Differentiation Technique in Device Model Parameter Extraction

Cheng B., Shao Z., Wang L., Tang T., Yu Z., Xi'an Jiaotong University, CN

Automatic Differentiation (AD), based on the nonstandard analysis theory, is a new technique in computer numerical analysis. An AD based algorithm for device model parameter extraction is presented. Using this algorithm, the constrained parameter extraction [...]

Resonant-Type Micro-Probe for Vertical Profiler

Lebrasseaur E., Bourouina T., Pourcie J-B., Ozaki M., Masuzawa T., Fujita H., LIMMS/CNRS-IIS, JP

We present a characterization method, which is dedicated to the measurement of the inner dimensions of high aspect ratio micro-holes, typically 100mm in diameter and 1mm in depth. Micro-probes with an integrated force-sensitive element are [...]

Analysis of an Electrostatic Microactuator with the Help of Matlab/Simulink: Transient and Frequency Characteristics

, ELMI, FR

The article is focused on the development of a numeric simulator dedicated to the electrostatic microactuator. It's based on the use of Simulink (Matlab „). The electrostatic microactuator is regard as a model <> associated [...]

Calculation of the AC Electroquasistatic Sinusoidal Steady-State Coulomb Force on a Conductor Coated with a Lossy Dielectric

Osterberg P., Inan A., University of Portland, US

The ability to directly calculate the analytical closed-form electroquasistatic sinusoidal steady-state Coulomb force (or ac force) exerted on a conductor coated with a lossy dielectric in the presence of a second grounded conductor and excited [...]

Torsional Ratcheting Actuating System

Barnes S.M., Miller S.L., Rodgers M.S., Bitsie F., Sandia National Laboratories, US

A new type of surface micromachined ratcheting actuation system has been developed at the Microelectronics Development Laboratory at Sandia National Laboratories. The actuator uses a torsional electrostatic comb drive that is coupled to an external [...]

Topics in Finite-Element Modeling of Piezoelectric MEMS Devices

von Preissig F.J., Kim E.S., University of Hawaii at Manoa, US

Techniques for modeling thin-piezoelectric MEMS devices using existing finite-element packages are examined. The emphasis is on non-resonant sensors and actuators, but most results are applicable to resonant devices and large structures as well. Characteristic features [...]

Topic: Modeling & Simulation of Microsystems