Modeling & Simulation of Microsystems – Page 30

Complex Fluid Dynamics in BioMEMS Devices

Liepmann D., University of California-Berkeley, US

MEMS technologies promises to revolutionize health care by providing precise control of biological fluids for both diagnoses and treatments. For example, microneedles can be used for sample collection for biological analysis, delivery of cell or [...]

Modeling and Simulation for MEMS Design, Industrial Requirements

Neul R., Robert Bosch GmbH, DE

The development process of today’s products is dominated by demands like ‘product performance’, ‘quality, ‘time to market’, ‘development cost’, ‘development risk’ etc., while the products’ complexity is increasing. Design methods for MEMS devices are discussed, [...]

The Vision and Action Plan of the National Nanotechnology Initiative

Roco M., National Science Foundation, US

The vision of novel phenomena, unity in nature, and promise of the most efficient manufacturing length scale has been essential in establishing the multidisciplinary National Nanotechnology Initiative (NNI). The research opportunities and projections of their [...]

Plenary Lectures

RESCUER – the New and Effective Tool for Automatic Models Reduction – Application for Electro-Thermal Problems

Napieralski A., Zubert M., Napieralska M., Technical University of Lódz Al, PL

This paper presents some methods of thermal model reduction and translation into hardware description languages or other ones. The very effective model reduction is achieved owing to the application of higher order approximation and joint [...]

A 2D Visualization Tool for SUMMiT V Designs

Yarberry V.R., Jorgensen C.R., Sandia National Laboratories, US

This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by [...]

Modeling of Electromagnetic Fields in High Speed Electronic Interconnects Using a Least Squares FD-TD Algorithm

Tramel R.W., Turowski M., Przekwas A.J., Schultz J., Frey R.G., CFD Research Corporation, US

A new Finite-Surface Time-Domain (FS-TD) numerical method is presented which is a generalization of the classical Finite-Difference Time-Domain (FD-TD) method of Yee. The method is divergence/charge preserving on arbitrary grids. It reverts to the standard [...]

Fail Pattern Classification and Analysis System of Memory Fail Bit Maps

Nakamae K., Itoh A., Fujioka H., Osaka University, JP

In order to determine problematic wafer processing steps rapidly during memory production, the system that classifies failure patterns from memory fail bit maps (FBMs) and estimates the cause of failure is proposed. The system mainly [...]

A 3D Geometry Modeler for the SUMMiT V MEMS Designer

Jorgensen C.R., Yarberry V.R., Sandia National Laboratories, US

This paper will describe the SUMMiT V 3D Modeler; a 3D geometric modeler based on Sandia National Laboratories new five-level process for manufacturing microelectromechanical systems (MEMS). The modeler simulates the SUMMiT V process, a baseline [...]

Convergence and Speed Issues in Analog HDL Model Formulation for MEMS

Iyer S., Jing Q., Fedder G.K., Mukherjee T., ECE Department, Carnegie Mellon University, US

Behavioral simulation using high-level hardware description languages (HDLs) is becoming increasingly relevant for mixed-domain MEMS simulation. In this paper three issues which impact the convergence and simulation time in MEMS behavioral simulations are addressed. First, [...]