MEMS & NEMS Devices, Modeling & Applications – Page 6

Towards generic platforms for MEMS manufacturing

Rouzaud A., Polizzi JP., Robert P., Arcamone J., CEA-LETI, FR

Coming at the time of technical maturity, MEMS industry requires now more standardization in manufacturing processes. This paper presents Leti’s contribution to develop generic platforms matching the suitable MEMS technologies within two distinct fields: physical [...]

MEMS pressure sensor with an AlGaN/GaN based high electron mobility transistor

Vanko G., Dzuba J., Rýger I., Vallo M., Institute of Electrical Engineering, SK

The III Nitrides (III-N), especially gallium nitride (GaN) and its compounds, are very attractive for pressure and strain sensing thanks to their excellent piezoelectric properties. The AlGaN/GaN heterostructure offers high mechanical and chemical stability, operation [...]

MEMS & NEMS Devices & Applications

TCAD Thermal Analysis of Gate Workfunction Engineered Recessed Channel MOSFET

Arora G., Monika M., Chaujar R., Delhi Technological University, IN

This paper discusses the thermal analysis of Gate Electrode Workfunction Engineered Recessed Channel (GEWE-RC) MOSFET involving an RC and GEWE design integrated onto a conventional MOSFET. Furthermore, it focuses on the comparative study of conventional [...]

Transmit and Receive of a cMUT Cell: Modeling and Experiments

Mao S.P., Rottenberg X., Rochus V., Helin P., Verbist A., Severi S., Nauwelaers B., Tilmans H.A.C., IMEC, BE

This paper presents the modeling, simulation and experimental verification of the transmit and receive properties of a single cell capacitive micromachined ultrasonic transducer (cMUT). It is a confirmation that the equivalent circuit model provides a [...]

Simple and Accurate Formula for the Electrostatically Actuated Curled Beam Problem

Younis M., SUNY Binghamton, US

We present analytical solutions of the electrostatically actuated initially deformed cantilever beam problem. We use a continuous Euler-Bernoulli beam model combined with a single-mode Galerkin approximation. We derive simple analytical expressions for two commonly observed [...]

A Computational Study on Detection of Ultra Small Volumes of Liquid and Solid Media in Microcavities Using Surface Acoustic Wave Devices

Senveli S.U., Tigli O., University of Miami, US

In this study, we use finite element method (FEM) analysis to show the possibility of a microsystem capable of detecting and analyzing liquid and solid media in minute amounts using surface acoustic wave (SAW) devices [...]

Modeling and Simulation of PVDF-TrFE Based MEMS Scale Cantilever Type Energy Harvesters

Toprak A., Tigli O., University of Miami, US

We present the FEM modeling and simulation of a cantilever type piezoelectric energy harvester constructed using PVDF-TrFE. PVDF-TrFE is a CMOS compatible, soft piezoelectric polymer with a moderate electromechanical coupling coefficient. It is also flexible [...]

Analysis and Simulation of Rare Cell Detection and Size Based Profiling Using Coupled Micro-Hall Detectors

Gajasinghe R.W.R.L., Gabriel A., Tigli O., University of Miami, US

In this paper, we propose a method that uses magnetic nanoparticles (MNPs) to detect, and also estimate sizes of rare cells using Hall-effect. Rare cells labeled with MNPs are detected in-flow using a pair of [...]

Nanomagnet Logic – From Concept to Prototype

Bernstein G.H., Butler K., Li P., Shah F., Siddiq M., Csaba G., Hu X.S., Niemier M., Porod W., University of Notre Dame, US

As the semiconductor industry foresees an inevitable slowing of Moore's Law, many researchers are trying to develop new technologies that go beyond CMOS, in speed, density, cost, or some other desirable metric. Notre Dame has [...]