Topic: MEMS & NEMS Devices, Modeling & Applications
Microsensors, Arrays and Automatic Diagnosis of Sensor Faults
As man-made dynamical systems become increasingly complex, there is an ever-present need to ensure their safe and reliable operation [1]. These requirements extend beyond the normally accepted safety-critical systems (e.g. nuclear reactors, chemical plants, and [...]
Microsystem Modeling – from Macromodels to Microsystem Design
The paper presents ideas about possible approaches to development of microsystem models. From the general point of view, microsystem (MST) is considered as a system dealing with non-electrical quantities from all energy domains of real [...]
The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications
We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]
Using Very Large Arrays of Intelligent Sensors
In 1994 the author patented an intelligent vibration sensor. The device was essentially an accelerometer with integrated analog and digital processing capability as shown in figure 1, which allowed a large proportion of the diagnostic [...]
Modeling a Growth Instability in Stressed and Ion-Implanted Doped Silicon
The effects of rate-enhancing dopants and externally applied stress on interfacial growth during silicon crystallization are modeled using advanced numerical methods. The boron doped crystalline Si is modeled as an isotropic linear elastic solid, and [...]
Capillary Interaction Between a Small Thin Solid Plate and a Liquid
Micromechanical systems are increasingly being used in micro fluidic and biological applications where solid-liquid interaction phenomena become important. Here, we present an analytical/computational study on the interaction force between a thin solid plate interfacing with [...]
Modeling Sub-Continuum Effects on the Mechanical Properties of Ultrathin Macromolecular Layers
This paper makes progress on the prediction of mechanical modulus and mechanical relaxation time of macromolecular materials at small length and time scales. Fundamental studies of large molecules in confined geometries inform predictions of macroscopic [...]
A Study of the Behaviour of Magnetic Microactuators
The behavior of an idealized magnetic microactuator is modeled and analyzed. A two parameter mass-spring model is shown to exhibit a bifurcation from one to three steady states as the geometry of the device is [...]