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HomeTopicsMEMS & NEMS Devices, Modeling & Applications

Topic: MEMS & NEMS Devices, Modeling & Applications

Design & Simulation of a CMOS MEMS using Standard Microelectronic CAD Environment

Latorre L., Beroulle V., Nouet P., LIRMM, FR
This paper concerns the design and simulation of a CMOS MEMS-Based Spectrum Analyzer. A Mechanical structure is used for high-Q filtering. Modeling is presented together with associated Verilog-A module. Small signal analysis are then performed [...]

Heat Transfer Macromodels for MEMS Devices with 3D Geometries

Yu C-C, Yang Y-J, National Taiwan University, TW
There are numerous heat transfer applications in MEMS, such as thermal actuating, uncooled infrared sensing, chip cooling, temperature sensing, PCR, and so on. Most of the applications need feedback loops for precise control or actuation, [...]

Static and Dynamic Analysis of Silicon NEMS

Tang Z., Aluru N.R., University of Illinois, US
Microelectromechanical systems (MEMS) have already revolutionized many areas including communications, information technology, medical, mechanical and aerospace technologies. Nanoelectromechanical systems (NEMS) are MEMS with submicron critical dimensions. NEMS have the potential to fundamentally change the way [...]

A Systematic Approach to Macromodeling Complex MEMS Devices

Casinovi G., Georgia Tech, US
This paper describes a modeling methodology for arbitrary MEMS devices based on the concept of element stamps. Previously published work has shown that element stamps can be used profitably to build models of MEMS devices [...]

Dynamic Simulation of MEMS Switches using Simulink

Combes D.J., Brunson K.M., John R., Bunyan T., QinetiQ Ltd, UK
A nodal model is implemented in Simulink and used to investigate the dynamics of electrostatically actuated MEMS switches. The model is based on reduced order 4DOF beam elements, with electrostatic forces based on simple parallel [...]

MEMS Modeling

Size and Strain Rate Effects in Tensil Deformation of Cu Nanowires

Liang W., Zhou M., Georgia Institute of Technology, US
Nanoscale plasticity has drawn significant attention in recent years. Extensive Experimental and numerical studies have been conducted in this field. In previous molecular dynamics (MD) simulations, the Nose-Hoover isothermal procedure was often used to maintain [...]

Monte Carlo Modeling of Micro-Scale Gas Flows

Fan J., Shen C., Chinese Academy of Sciences, CN
In the past few years, an information preservation (IP) method [1-6] has emerged as a numerical technique to analyze subsonic, micro-scale gas flows. In this method, simulated molecules move through physical space and undergo collisions [...]

Air Damping in an Ultra-High-Frequency Disk Resonator

Yap L.K., Yap L.Y., Yap L.K., Yap L.Y., Ye W., Georgia Institute of Technology, US
In this paper we investigate the air damping in a circular disk radially oscillating at 1GHz. First the compressibility effects of air between the disk and the substrate are studied. The pressure perturbation along the [...]

Superharmonic Resonance of an Electrically Actuated Resonant Microsensor

Abdel-Rahman E.M., Nayfeh A.H., Virginia Polytechnic Institute and State University, US
We investigate the response of a microbeam-based resonant sensor to a superharmonic electric actuation. The model incorporates the nonlinearities associated with moderately large displacements and electric forces. The method of multiple scales is used to [...]

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