MEMS & NEMS Devices, Modeling & Applications – Page 49

GEMS: A Revolutionary System for Environmental Monitoring

Manobianco D.M., Manobianco J., Evans R.J., Pister K.S.J., Manobianco D.M., Manobianco J., ENSCO, Inc., US

This paper describes a revolutionary, new observing system designed for environmental monitoring that will integrate MicroElectroMechanicalSystems (MEMS) and nanotechnologies. The concept, known as Global Environmental MEMS Sensors (GEMS), features an integrated system of airborne probes [...]

Design and Development of an Integrated MEMS Sensor for Real Time Control of Plasma Etching

Morris B.G., May G.S, Georgia Institute of Technology, US

This paper explores a novel technique for monitoring film thickness in reactive ion etching that incorporates a micromachined sensor. The prototype sensor correlates film thickness with the change in resonant frequency that occurs in the [...]

Simulation of Micromachined Inertial Sensors with Higher-Order Single Loop Sigma-Delta Modulators

Dong Y., Kraft M., University of Southampton, UK

Micromachined capacitive inertial sensors incorporated in sigma-delta force-feedback loops have been proven to improve linearity, dynamic range and bandwidth, and also provide a direct digital output. Previous work mainly focused on using only the sensing [...]

System Issues in Arrays of Autonomous Intelligent Sensors

Newman R.M., Gaura E.I., Conventry University, UK

This paper considers some of the systems level issues of concerned when building of large scale sensing systems composed of a large number of autonomous intelligent sensors. The work is motivated by the potential offered [...]

Smart MEMS and Sensor Systems

Pumping Capacity and Reliability Study on Silicon-Based Cryogenic Micro Pump

Zhao Y., Li B., Ludlow D., Zhang X., Boston University, US

As part of a program to develop a cooling system for satellite instrumentation capable of working at cryogenic temperature, we present herein pumping capacity and material reliability study on a silicon-based cryogenic micro pump which [...]

Practical Techniques for Measuring MEMS Properties

Clark J.V., Garmire D., Last M., Demmel J., Govindjee S., Berkeley Sensor and Actuator Center, US

We describe simple test structures and practical analysis techniques to measure properties of MEMS devices. Our structures are designed to test many quantities using simple electric probes in a minimal chip area. We analyze differences [...]

A MOEMS Electrothermal Grating

Furlani E.P., Eastman Kodak Research Labs, US

We present a thermoelastically driven MOEMS light modulator in the form of an ElectroThermal Grating (ETG). The ETG consists of an array of equally spaced bilayer microbeams suspended at both ends above a substrate (Fig. [...]

Device Characterization at the Wafer Level via Optical Actuation and Detection

Hedley J., Burdess J.S., Harris A.J., Gallacher B.J., Newcastle University, UK

This paper investigates the technique of optical actuation of MEMS. It is shown that a device can be driven into all of its vibrational modes simply and non-destructively by a laser pulse, making this an [...]

Two-Regime Hollow PDMS Abbe Prism for u-TAS Applications

Llobera A., Wilke R., Büttgenbach S., Institut für Mikrotechnik, DE

A new robust and compact system, which comprises a PDMS-based hollow Abbe prism and microlenses, together with self-alignment channels for optical fibre positioning, is presented. This optical detection method has two different regimes for signal [...]