MEMS & NEMS Devices, Modeling & Applications – Page 37

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”

Rouabah H.A., Gollasch C.O., Kraft M., University of Southampton, UK

The advance of MEMS based sensors and microfabrication techniques has facilitated innovative technologies such as so-called ‘atom chips’, where a cloud of ultra cold atoms in a Bose Einstein Condensate (BEC) is controlled and manipulated [...]

Zeolite Membrane Microreactors for Fine Chemical Synthesis

Zhang X., Lai S.M., Lam K.F., Yeung K.L., Martin-Aranda R., Hong Kong University of Science and Technology, CN

The performance of a membrane microreactor was tested and compared with that of microreactor, packed bed reactor (PBR) and packed bed membrane reactor (PBMR) for the Knoevenagel condensation reaction of benzaldehyde and ethyl cyanoacetate to [...]

Control of Particles Using Multi-Frequency DEP

Loire S., Zhang Y., Bottausci F., Mezic I., McDonald N., university of california, santa barbara, US

We present numerical simulations and experiments on dielectrophoretic (DEP) separation and trapping performed in a titanium-based microchannel linear electrode array. The device is designed to allow for effects driven by inhomogeneities in electric-field magnitude driven [...]

The Optimisation of a Resonant Gas Sensor by Using Nano-Tectured Surfaces

Docker P.T., Kinnell P.K., Ward M.C.L., University of Birmingham, UK

This paper describes the potential for optimising a resonant gas sensor by using nano-textured surfaces. Initial modelling proved that a device with a nano-textured active layer could have its surface area increased by an order [...]

Y-nano X-micro Technologies: nanometric optical control

de Lima Monteiro D.W., Honorato F.P., Ferreira Jr A.I., Soloviev O., Vdovin G., Loktev M., Federal University of Minas Gerais, BR

Nanometric control of optical quality is relevant in many different fields, ranging from Ophthalmology to Lithography, where ordinary setups suffer from optical aberrations. Most common aberrations feature amplitudes in the nanometer range and are often [...]

Intelligent Sensors: Systems or Components?

White N., Southampton University, UK

This paper reviews the field of intelligent (smart) sensor technology and describes some of the trends that have emerged over the last two decades. The functionality of intelligent sensors is discussed, together with an assessment [...]

Towards Nano Mechanical Sensors

Hierold C., ETH Zürich, CH

This paper is about the impact of scaling on the system performance of mechanical inertia sensors and first activities towards nano mechanical sensors. Permanent cost pressure will result in continuous efforts to integrate more functions [...]

MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities

Zunino III J.L., Skelton D., Mason R., U.S. Army Corrosion Office, US

As the U.S. Army transforms into a lighter, more lethal force, the technologies that support both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such [...]

Higher Order Sigma-Delta Modulator Interfaces for MEMS Capacitive Sensors

Kraft M., Dong Y., Southampton University, UK

Using higher order sigma-delta modulator topologies, similar to the ones used for electronic A/D converters, and applying them to micromachined capacitive sensors is a promising approach to increase the performance of these sesnors. The paper [...]

Nanoparticle Separations Using Miniaturized Field-Flow Fractionation Systems

Graff M., Edwards T.L., Gale B.K., Frazier A.B., Georgia Institute of Technology, US

Paper describes the fabrication and testing of a micromachined electrical field-flow fractionation system, performing separations of various types of nanoparticles.