MEMS & NEMS Devices, Modeling & Applications – Page 31

Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures

Liu J., Fedder G.K., Sassolini S., Sarkar N., Carnegie Mellon University, US

A new Young’s modulus test structure has been designed and used in our lab. Simple models have been built in simulating lateral and vertical stress gradients. Test structures, measurements and FEA simulations are reported on [...]

MEMS Device Modeling

Active Sealing for Soft Poymer Microchips

Bang H., Lee J., Lee W.G., Park J., Yun H., Lee J., Lee W.G., Chung C., Chung S., Cho K., Chung C., Chung S., Han D-C, Chang J.K., Seoul National University, KR

This paper presents a universal sealing method for soft polymer (elastomer) microchips. A robust and reversible sealing method which allows various materials to be bonded and sealed tightly with each other even in aqueous solutions, [...]

Optimization of Diffractive MEMS for Optical Switching

Verheggen J., Panaman G., Khan Raja W., Castracane J., University at Albany-SUNY, US

Micro-Opto-Electro-Mechanical Systems (MOEMS) have found many applications in the fields of communication, spectroscopy, and displays. MOEMS devices based on dynamic diffractive elements are currently investigated at CNSE. The possible applications include: optical switching, signal monitoring, [...]

Negative-Poisson’s-Ratio (NPR) Microstructural Material by Soft-Joint Mechanism

Lu Y-W, Chang C-J, Lin P-T, Gea H-C, Rutgers University, US

We present an example of making a negative-coefficient material - Negative Poisson’s Ratio (NPR) material, which expands in the cross section when stretching. The NPR materials can provide unique characteristics in energy absorption. The NPR [...]

Electromechanical System for Lorentz Force Compensation

Sekalski P., Napieralski A., Simrock S., Technical University of Lodz, PL

The cavity is the main element of each linear accelerator used for high-energy physics purpose. The resonant frequency of cavities depends on its shape. Due to the pulse operation they are deformed by dynamic Lorentz [...]

Ultra High performance In-line Contact MEMS RF Switch

Hong Y-T, Kim C-H, Lee S-H., Kwon S-W, Song I-S, Samsung Advanced Institute of Technology, KR

An in-line direct RF MEMS Switch was presented in this paper. This switch having single contact point was fabricated, and characterized. The switch is a series type and is actuated by a supportive membrane. A [...]

Sensitivity to Shape and Membrane Thickness Variations in Capacitive Pressure Sensors

Sabet A., Avula X.J., Washington University in St. Louis, US

capacitive pressure sensor, membrane thickness, membrane shape, sensitivity

A Capillary Electrophoresis Chip for Rhodamine B and Inorganic Ion detection Utilizing Contactless Capacitance Detection

Liu W.L., Chen W.J., Hsieh S.H., Tsai T.K., National Pingtung University of Science and Technology, TW

A microfluidic channel and a contactless capacitance detector wereintegrated on a glass chip by a semiconductor manufacturing process forseparating and analyzing Rhodamine B and inorganic ion. The electrodes of thecapacitance detector were formed successively by [...]

Dielectrophoretic ratchets for linear and rotary nanomotors

Hughes M.P., Astumian R.D., University of Surrey, UK

Dielectrophoresis (DEP) is a phemomenon of induced particle motion in non-uniform electric fields. In this paper, we will describe how the phenomenon can be used to design electrokinetic ratchet devices to provide both linear and [...]