MEMS & NEMS Devices, Modeling & Applications

High Sensitivity MEMS Pressure Sensor

Juetten M., Iowa State University Research Foundation, US

Summary: ISU researchers have developed a high-sensitivity microelectromechanical system (MEMS), graphene-based pressure sensor that outperforms any existing MEMS-based small footprint pressure sensor. Description: ISU researchers have developed a microelectromechanical system (MEMS) graphene-based pressure sensor realized [...]

A new humidity sensor based on the effect of water content on a capacitive MEMS oscillator’s thermo-electrical characteristics

Alsaleem F., University of Nebraska Lincoln, US

Accurate humidity measurement is essential in commercial and industrial applications such as HVAC systems and microelectronics manufacturing. Typical humidity sensors suffer from degradation over time, consume a relatively high amount of power, and have limited [...]

MEMS Inertial Sensors for Cyber-Physical Systems: Trustworthy Sensing, Secure Communication, Data Fusion and Information Control

Herlihy L., Rochester Institute of Technology, US

This paper reports the experimental results for the inertial measurement units (IMUs). Consistent models are found. The documented findings and models can be used in the descriptive, predictive and prescriptive analyses. Our findings are substantiated [...]

QUARTZ MEMS OSCILLATORS FOR HIGH-PERFORMANCE NAVIGATION AND WIRELESS COMMUNICATION SYSTEMS

Chang D.T., Yoon Y., Moyer H.P., Nguyen H.D., HRL Laboratories, LLC, US

Quartz MEMS resonators are attractive for use in oscillators for stable frequency control applications in navigation and wireless communication systems by virtue of their reduced cost, size, weight, and power (CSWaP), combined with the potential [...]

Piezoelectric actuators, next driver for MEMS market?

Fanget S., Casset F., Nicolas S., Dieppedale C., Allain M., Desloges B., Le Rhun G., CEA-LETI, FR

Over the past three decades, huge progresses have been made in MEMS technologies. Hundreds millions of MEMS, principally: accelerometers, gyroscopes and microphones, are commercialized yearly. This should continue to increase with upcoming new applications related [...]

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE

With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]

Wafer level integration of epitaxial piezoelectric thin films for novel NEMS, MEMS and MOEMS applications

Dekkers M., Solmates BV, NL

It is well known that Pulsed Laser Deposition (PLD) is a very flexible and versatile technique allowing fast optimization of new and complex material thin films. The unique features of PLD allow for the integration [...]

MTS Model Theory in Small Volume Electronic Materials

Saptono R., Kim C-U., Universitas Indonesia, ID

Efforts have been made to study and model the temperature-dependence of flow stress. Mechanical Threshold Stress (MTS) model is one of the most admired physical mechanistic models. The model was developed on the basis of [...]

Modeling of novel concept design for extremely small UHF band transmit/receive element based on multiferroics

Carka D., Sepulveda A., Keller S., Carman G.P., New York Institute of Technology, US

Multiferroic heterostructures consisting of a piezoelectric or ferroelectric material and a ferromagnetic material with magnetostrictive properties allow for cross coupling of the electric and magnetic degrees of freedom via strain mediation of the magnetoelectric coupling. [...]