MEMS & NEMS Devices, Modeling & Applications – Page 22

Practical issues with ion beam milling in acoustic resonator technologies

Mishin S., Oshmyansky Y., Bi F., Advanced Modular Systems, Inc, US

A practical approach to addressing production issues of thickness trimming was demonstrated through two-step trimming, send-ahead wafer, and deposition/trimming cluster tool. Thickness control necessary in SAW/BAW technology was demonstrated.

Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study

Chaehoi A., Weiland D., O’Connell D., Bruckshaw S., Ray S., Begbie M., Institute for System Level Integration, UK

This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access “one-stop-shop” prototyping facility for integrated MEMS. This work addresses the [...]

Micro Crumples for Self-Assembly of Field Emission Devices

Sambandan S., Palo Alto Research Center, US

We study the electrostatic properties of crumpled conducting films, in particular the effective vertical electric field. The inspiration for this work is the possibility of self-organizing field emission devices with aims to reduce the cost [...]

Maskless Lithography Using Patterned Amorphous Silicon Layer Induced by Femtosecond Laser Irradiation

Kiani A., Venkatakrishnan K., Tan B., Ryerson University, CA

In this research, we reported a maskless lithography method by a combination of laser amorphization of silicon and wet alkaline etching. This technique can lead to a promising solution for maskless lithography because in comparison [...]

Influence of resist composition on demolding force in UV nanoimprint lithography

Amirsadeghi A., Lee J., Park S., Louisiana State University, US

We investigated the influence of the Young’s Modulus (E) of UV resist on the measured demolding force in UV-NIL by varying compositions of UV-curable polymers. We found that decreasing crosslinking content of the polymers decreases [...]

MEMS Fab: Design, Manufacture, Instrumentation

Fully On-Chip High Q Inductors Based on Microtechnologies

Shah K., Khalid N., Singh J., Le H.P., Devlin J., Sauli Z., La Trobe University, AU

The fast growing demand of wireless communications for voice and data has driven recent efforts to dramatically increase the levels of integration in radio frequency (RF) transceivers. Passive components such as inductor play important role [...]

Low Cost Paper Based Bowtie Tag Antenna for High Performance UHF RFID Applications

Amin Y., Prokkola S., Shao B., Hållstedt J., Chen Q., Tenhunen H., Zheng L-R, Royal Institute of Technology (KTH), SE

In this paper, we have realized a bowtie antenna for UHF RFID Tag with extended round corners for the first time printed on paper substrate. The state of the art CAD tool Ansoft® HFSS is [...]

Power consumption of microelectronic equipment for wireless sensor networks

Poole N., Mo T., Brusey J., Coventry University, UK

The paper reports on research conducted by the authors into the power consumption of the microelectronics employed in a variety of practical wireless intelligent sensor applications. It aims to provide results that will inform developers [...]

Study on Application of Piezoelectric Vibration Energy Harvesters for Powering of Wireless Sensor Nodes in Large Rotary Machine Diagnostic Systems

Pekoslawski B., Pietrzak P., Makowski M., Szafoni L., Napieralski A., Technical University of Lodz, PL

A condition monitoring of large rotary machines such as turbogenerators in power plants can be more convenient and less expensive when using a distributed measurement system with wireless sensor nodes. A battery-based powering of these [...]