MEMS & NEMS Devices, Modeling & Applications – Page 10

In-Situ Assessment of Wafer-Level Hermeticity by Micromembrane Technique

Yang C.-M., Jung H., Park E.M., Park J.H., Park E.M., Park J.H., Kim H-Y, Lee K-R, National Nano FabCenter, KP

Generally, the quantitative hermeticity of Wafer level Vacuum Packaging (WLVP) has been evaluated by integration of pirani gauge vacuum senses. But, this requires complex fabrication process and higher chip cost. In this work, hermeticity and [...]

Fabrication of complex three-dimensional multilevel silicon micro- and nano-structures

Azimi S., National University of Singapore, SG

We have developed a new process to fabricate arbitrary-shaped, multilevel, three-dimensional free-standing micro- and nano-structures on bulk silicon using focused high energy proton beam irradiation, followed by electrochemical anodization. We make use of the fact [...]

Fabrication of electrical microfluidic chip for electroporation of mammalian cells

Shahini M., Wijngaarden F.V., Yeow J.T.W., University of Waterloo, CA

The point of this paper is to demonstrate the use of a quick and cheap fabrication method to realize a laser-ablated microfluidic channel for single cell electroporation. Traditional lithography of microchannel with electrode in MEMS [...]

Dual Helix Dielectrophoretic Cell Separator Fabricated Using the Direct-Write Spindle Deposition Technique

Guérin N., Lévesque M., Therriault D., École Polytechnique de Montréal, CA

Many biomedical procedures necessitating the separation of cells would benefit from the miniaturization of cell separators. This miniaturization effort has led to the development of 2D dielectrophoretic separators. The use of a 3D dielectrophoretic cell [...]

Tungsten for CMOS-MEMS Pirani and Ionization Vacuum Gauges

Wang J., Tang Z., Dalian University of Technology, CN

Tungsten is consider to be the most suitable material for the CMOS-MEMS vacuum gauges, including Pirani vacuum gauge and ionization vacuum gauge, due to its high temperature coefficient, resistant to the electromigration failure, high melting [...]

Contact resistance modeling for NEMS ohmic relays using highly doped SiGe contact material

Ramezani M., Tamaddon A.H., Severi S., Vanstreels K., De Meyer K., Witvrouw A., IMEC, BE

The principal goal of this work is to develop a more accurate model for the contact resistance using the real surface profile of the contacting material in comparison to the state-of-the art where the surface [...]

Hydrogel-based multi-stimuli responsive cilia

Glazer P.J., Leuven J., An H., Lemay S.G., Mendes E., Delft University of Technology, NL

We present large-scale multi-responsive cilia arrays that can be stimulated environmentally (via a pH change), electrically or magnetically. By means of micro-fabrication techniques, we created high-aspect ratio molds on which the polymer solution was cast. [...]

Micro/Nano Patterned Integrated Electrochemical Sensors for Implantable Applications

Mujeeb-U-Rahman M., Adalian D., Sencan M., Scherer A., California Institute of Technology, US

Electrochemical sensors are very important candidates for many sensing and actuation applications. Micro/Nano scale techniques are very appealing in designing these sensors for completely integrated systems. Such systems can provide accurate and long-term measurements of [...]

Nanomaterials-Enabled Photonic and Chemiresistive Sensing of Chemicals and Biochemicals

Choi C-J, Benkstein K.D., Rogers P.H., Montgomery C.B., Semancik S., National Institute of Standards and Technology, US

Contact events occurring between target species and surface sites on sensing materials initiate front-end interactions and subsequent transduction processes that can yield viable signals for target detection. By offering high surface-to-volume ratios, and specialized properties, [...]

Differentiation of Complex Vapor Mixtures Using Versatile DNA-Carbon Nanotube Chemical Sensor Arrays

Kybert N.J., Lerner M.B., Yodh J.S., Preti G., Johnson A.T.C., University of Pennsylvania, US

Vapor sensors based on functionalized carbon nanotubes (NTs) have shown great promise, with high sensitivity conferred by the reduced dimensionality and exceptional electronic properties of the NT. Critical challenges in the development of NT-based sensor [...]