Sensors, MEMS, Electronics – Page 408

Automated Solid Model Extraction for MEMS Visualization

DeVoe D.L., Green S.B., Jump J.M, University of Maryland, US

A software tool has been developed to enable the rapid generation of solid models for MEMS structures. The automated 3-dimensional model extraction (3DMX) software, together with a description of a MEMS process, is capable of [...]

Coupling of Length Scales and Atomistic Simulation of a MEMS Device

Rudd R.E., Broughton J.Q., SFA, Inc., US

We simulate the dynamic and temperature dependent behavior of two different Micro-Electro-Mechanical Systems (MEMS) by utilizing recently developed parallel codes which enable a coupling of length scales. The novel techniques used in this simulation accurately [...]

A Fast Integral Equation Technique for Analysis of Microflow Sensors Based on Drag Force Calculations

Aluru N.R., White J.K., Massachusetts Institute of Technology, US

It is well known that MEMS based microfluidic devices operate in very low Reynolds number regime (Re < 1). Analysis and design of such microfluidic devices requires the solution of incompressible viscous fluid flow or [...]

Discretization, Numerics, Computational Efficiency

Accurate Lumped-Parameter modeling for Dynamic Simulation of Electrostatic MEMS Actuators

Pal Chaudhury S., Winick D., Franzon P., North Carolina State University, US

This paper introduces a novel approach of accurately modeling electrostatically actuated MEMS structures, using a lumped parameter electrical analogy based on voltage controlled de.es in Spice. This analysis takes into account the changes in capacitive [...]

Complete Transient Simulations of Electrostatic Actuators

Cojocaru C., Lerch P., Kloeck B., Bourgeois C., Renaud Ph., EPFL, CH

A code for the dynamical simulation of electrostatic actuated micromechanical systems with complex 3D geometry was created. It allows exact electrical force computation at each time step during the dynamic analyses. A finite element method [...]

System Level Simulation of a Digital Accelerometer

Kraft M., Lewis C.P., Coventry University, UK

This paper describes the derivation of a detailed model of a micromachined accelerometer and its implementation in a commercial SPICE package. The sensing element is modeled at a system level, the control and interface electronics [...]

Electrical Analogue of Capacitive Force-Balanced Accelerometer Used in HSPICE Simulator

Li Z., Wu G., Wang Y.Y., Peking University, CN

Analyzing mechanism of accelerometer, electrical analogue of capacitive force-balanced accelerometer used in HSPICE simulator has been developed. Comparing to the former equivalent circuit, we use acceleration instead of displacement as input variable. Thus we can [...]

Spice-like Simulation Using Real Devices Instead of their Mathematical Models

Denisenko V.V., Research Laboratory of Design Automation, RU

Modern Spice-like circuit simulators use increasingly accurate and sophisticated analytical models of components. But the validity of models, that is the probability that the procedure of the model verification is true, still remains very poor. [...]

Modeling and Simulation of a Stiffness-Controlled Micro-Bridge Resonator

Verjus F., Bourouina T., Belhaire E., Mauduit N., Bosseboeuf A., IEF-CNRS, FR

This paper deals with the modelin and simulation of electrical stiffness control of a micro-bridge. Stiffness variations are obtained by compressive stresses that result from Joule heating. The micro-bridge is slaved to resonance in order [...]