Sensors, MEMS, Electronics – Page 31

Optofluidic Temperature and Pressure Measurements with Fiber Bragg Gratings Embedded in Microfluidic Devices

Cooksey G.A., Wright J.D., Ahmed Z., National Institute of Standards and Technology, US

(INTRODUCTION) The integration of photonic sensors into microfluidic devices provides opportunities for dynamic measurement of chemical and physical properties of fluids in very small volumes. Microfluidic platforms provide sub-microliter control of fluid transport and mixing [...]

Combined Device- and System-level Simulation of RF MEMS Switches

Schrag G., Künzig T., Niessner M., Wachutka G., Technical University of Münich, DE

We present two problem-adapted, tailored modeling approaches for RF-MEMS switches which, in principle, are applicable to any capacitive MEMS device. They are based on finite element analysis (FEA) combined with analytical, lumped-element, and reduced-order modeling [...]

Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process and Anodic Bonding

Toan N.V., Hahng S., Song Y., Ono T., Tohoku University, JP

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. The silicon through-wafer interconnects have been investigated by glass reflow process. Then, [...]

New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive

Gu-Stoppel S., Stenchly V., Kaden D., Quenzer H.-J., Wagner B., Hofmann U., Dudde R., Fraunhofer Institute Silicon Technology, DE

New devices of 1 and 2dimensional micro-mirrors based on new designs and new process capabilities using piezoelectric actuators are presented. For micro-mirrors an 8’’ wafer-level packaging process was developed using pre-processed borosilicate glass wafers. An [...]

Freestanding Membranes of Cross-Linked Gold-Nanoparticles: Novel Functional Material for MEMS/NEMS Applications

Schlicke H., Schröter C.J., Rebber M., Battista D., Kunze S., Vossmeyer T., University of Hamburg, DE

We present the focus of our current research, which is the investigation of the electronic and mechanical properties of freestanding gold nanoparticle (GNP) membranes, e.g. by micro bulge tests with atomic force microscopy (AFM) data [...]

SU8-graphene: a new photo-patternable conductive polymer composite

Majidian M., Grimaldi C., Baibarac M., Baltog I., Forró L., Magrez A., EPFL, CH

SU8 epoxy is a photo-resist with great intrinsic properties such as high thermal stability, chemical and mechanical robustness along with high sensitivity to UV. Having eight reactive epoxy sites in each monomer molecule, a high [...]

MEMS & NEMS Devices, Modeling & Applications

Open Droplets: Programming Chemical Flow in Microfluidics

Baret J-C., University of Bordeaux, FR

Droplet-based microfluidics is the key technology for the miniaturization and automation of assays in microcompartments. It relies on the use of emulsion droplets as microreactors each encapsulating a biological system of interest (genes, cells, drugs,...) [...]

Reviving natural product and drug discovery pipelines with fungal artificial chromosome (FAC) technology

Clevenger K., Bok J.W., Ye R., Miley G., Velk T., Chen C., Yang K.H., Gao P., Lamprecht M., Thomas P., Islam M.D., Keller N., Kelleher N., Wu C., Intact Genomics, Inc., US

We have developed the fungal artificial chromosome [FAC, or autonomously replicating E. coli- fungal shuttle bacterial artificial chromosome (BAC)] vector and system. The FAC technology enables unbiased capturing of 263 full-length large secondary metabolite (SM) [...]

nano Droplet Array Plates (nDAPs): 3D Cell Culture in Anchored Hydrogel Droplets Compatible with Conventional Microplates

Xu Q.F., Chen X., Lyons A.M., ARL Designs LLC, US

University researchers as well as large pharmaceutical companies need improved technologies for discovering new drugs. Current drug-discovery approaches are highly inefficient, as