MEMS & NEMS Devices, Modeling & Applications

SU8-graphene: a new photo-patternable conductive polymer composite

Majidian M., Grimaldi C., Baibarac M., Baltog I., Forró L., Magrez A., EPFL, CH

SU8 epoxy is a photo-resist with great intrinsic properties such as high thermal stability, chemical and mechanical robustness along with high sensitivity to UV. Having eight reactive epoxy sites in each monomer molecule, a high [...]

Freestanding Membranes of Cross-Linked Gold-Nanoparticles: Novel Functional Material for MEMS/NEMS Applications

Schlicke H., Schröter C.J., Rebber M., Battista D., Kunze S., Vossmeyer T., University of Hamburg, DE

We present the focus of our current research, which is the investigation of the electronic and mechanical properties of freestanding gold nanoparticle (GNP) membranes, e.g. by micro bulge tests with atomic force microscopy (AFM) data [...]

New Designs for MEMS-Micromirrors and Micromirror Packaging with Electrostatic and Piezoelectric Drive

Gu-Stoppel S., Stenchly V., Kaden D., Quenzer H.-J., Wagner B., Hofmann U., Dudde R., Fraunhofer Institute Silicon Technology, DE

New devices of 1 and 2dimensional micro-mirrors based on new designs and new process capabilities using piezoelectric actuators are presented. For micro-mirrors an 8’’ wafer-level packaging process was developed using pre-processed borosilicate glass wafers. An [...]

Fabrication of Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process and Anodic Bonding

Toan N.V., Hahng S., Song Y., Ono T., Tohoku University, JP

This paper presents a process for the fabrication of vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) arrays using glass reflow and anodic bonding techniques. The silicon through-wafer interconnects have been investigated by glass reflow process. Then, [...]

Combined Device- and System-level Simulation of RF MEMS Switches

Schrag G., Künzig T., Niessner M., Wachutka G., Technical University of Münich, DE

We present two problem-adapted, tailored modeling approaches for RF-MEMS switches which, in principle, are applicable to any capacitive MEMS device. They are based on finite element analysis (FEA) combined with analytical, lumped-element, and reduced-order modeling [...]

Optofluidic Temperature and Pressure Measurements with Fiber Bragg Gratings Embedded in Microfluidic Devices

Cooksey G.A., Wright J.D., Ahmed Z., National Institute of Standards and Technology, US

(INTRODUCTION) The integration of photonic sensors into microfluidic devices provides opportunities for dynamic measurement of chemical and physical properties of fluids in very small volumes. Microfluidic platforms provide sub-microliter control of fluid transport and mixing [...]

The TubeClear® System – On the Market for Clearing Clogged Feeding Tubes – and Evaluating Increasingly Challenging Tubes in the Body: NSF SBIR Funded Medical Device Platform

Bagwell R.B., Aippersbach S.M., Becker N.C., Dillon D.R., Mulvihill M.L., Actuated Medical Inc, US

Feeding tubes deliver critical nutrition and medications to patients that are unable to swallow. Unfortunately, these tubes often clog. Clogged feeding tubes can cause patients to go extended periods without food and medication. Traditional methods [...]

Millimeter Wave Therapy

Eckert B., Truong H., Izadjoo M., ChiScan and Trideum Biosciences, US

Millimeter wave therapy has been extensively studied in Eastern Europe. The apparatus varies from IMPATT and Gunn oscillators to IMPATT noise sources, while the power density can range from 1mW/cm^2 down to the Nano-watt range. [...]

Predicting the Response of an All-Elastomer In-Plane MEMS Tactile Sensor

Kalayeh K.M., Charalambides A., Charalambides P.G., Bergbreiter S., Charalambides A., Charalambides P.G., UMBC, US

This study is motivated by the need to develop highly sensitive tactile sensors for both robotic and bionic applications. The developments of advanced technologies in robotic grasping, motion of prosthetics, and robot assisted biomedical surgery [...]

Simulation of Buffer Current Effects on Breakdown Voltage in AlGaN/GaN HEMTs Having Passivation Layers with Different Permittivity

Satoh Y., Hanawa H., Horio K., Shibaura Institute of Technology, JP

It is well known that the introduction of filed plate enhances the breakdown voltage in AlGaN/GaN HEMTs. This is because the electric field at the drain edge of the gate is reduced. However, the field [...]

Simulation of Current Slump Removal in Field-Plate GaAs MESFETs with a Thin Passivation Layer

Nomoto A., Sato Y., Horio K., Shibaura Institute of Technology, JP

In compound semiconductor FETs, slow current transients are often observed even if the drain voltage VD or the gate voltage VG is changed abruptly [1]. This is called drain lag or gate lag, and undesirable [...]

Simulation of Lags and Current Collapse in Field-Plate AlGaN/GaN HEMTs with Different Types of Buffer Layers

Tsurumaki R., Noda N., Horio K., Shibaura Institute of Technology, JP

In AlGaN/GaN HEMTs, slow current transients are often observed even if the gate voltage VG or the drain voltage VD is changed abruptly. This is called gate lag or drain lag, and is problematic for [...]

Design and Simulation of Electrostatic Imaging System based on MEMS

Li M-X, Chen X., Pan X., Kang J-S., Beijing Institute Technology, CN

The electrostatic imaging system obtains the contour profile of charged target by sensing the electrostatic field around. MEMS technology has the characteristic of microelectronic integration and miniaturization. In this paper, an electrostatic imaging system is [...]

Modeling of novel concept design for extremely small UHF band transmit/receive element based on multiferroics

Carka D., Sepulveda A., Keller S., Carman G.P., New York Institute of Technology, US

Multiferroic heterostructures consisting of a piezoelectric or ferroelectric material and a ferromagnetic material with magnetostrictive properties allow for cross coupling of the electric and magnetic degrees of freedom via strain mediation of the magnetoelectric coupling. [...]

MTS Model Theory in Small Volume Electronic Materials

Saptono R., Kim C-U., Universitas Indonesia, ID

Efforts have been made to study and model the temperature-dependence of flow stress. Mechanical Threshold Stress (MTS) model is one of the most admired physical mechanistic models. The model was developed on the basis of [...]

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