Advanced Materials & Manufacturing – Page 607

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fabricated by Multi-Users MEMS Process (MUMPs) with a post-processing bulk etching step. Micromachined actuators have potential applications in microtransducers such as scanning tunneling microscope [...]

Design & Simulation of a Mechanical Amplifier for Inertial Sensing Applications

Kham M.N., Houlihan R., Kraft M., Southampton University, UK

This paper describes the design and simulation of a mechanical amplifier used to improve the performance of a capacitive accelerometer. It comprises a long silicon beam attached to the proof mass and it amplifies the [...]

A MEMS Tunable Inductor

Zine-El-Abidine I., Okoniewski M., McRory J.G., University of Calgary and TRLabs, CA

This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above [...]

Design and Manufacturing of a Miniaturized 2.45GHz Bulk Acoustic Filter by High Aspect Ratio Etching Process

Lin C.H., Chen H-R, Du C-H, Fang W., National TsingHua University, TW

A 2.45GHz filter is fabricated by thin film bulk acoustic wave resonator (FBAR) technology. Especially, it is designed to minimize die size and to simplify fabrication process simultaneously by using inductive coupling plasma etching. The [...]

Geometrical Effects in Mechanical Characterizing of Microneedle for Biomedical Applications

Aggarwal P., Johnston C., University of Calgary, CA

This paper discusses the design and implementation of MEMS microneedle with emphasis on integrated functionality for sensing the forces. The idea is based on the requirements of strength, robustness, and minimal insertion pain and tissue [...]

Lattice Boltzmann Simulations Comparing Conventional and a Heat Conduction Based Flow-Through PCR Micro-Devices

Mautner T., SPAWAR Systems Center San Diego, US

This paper describes the lattice Boltzmann, numerical simu-lations used to evaluate a conduction-based, polymerase chain reaction (PCR) device for uniformity of the micro channel temperature profile and its velocity field distribu-tion. For comparison purposes, numerical [...]

A New Method to Design Pressure Sensor Diaphragm

Wang X., Li B., Lee S., Sun Y., Roman H.T., Chin K., Farmer K.R., New Jersey Institute of Technology, US

Over the last decade, silicon pressure sensors have undergone a significant growth. In most cases, these MEMS (Microelectromechanical System) devices are manufactured from rectangular or circular diaphragms whose thickness is constant and in the order [...]

Sector: Advanced Materials & Manufacturing