We examine high quality factor (Q) nonlinear wide- bandwidth resonance for microelectromechanical systems (MEMS) by mimicking high nonlinearity in stiffness by force feedback. The Q and bandwidth are usually thought of as being inversely proportional to each other for linear systems, where a large Q is achieved with a narrow bandwidth, and vice versa. However, by invoking a feedback force that mimics highly nonlinear stiffness, we demonstrate that it may be possible to achieve the behavioral benefits of both large amplitude and wide bandwidth. As a test case, we demonstrate how this concept may benefit devices that suffer from thermal drift or mode mismatch, such as MEMS vibratory gyros.
Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 341 - 344
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Sensors - Chemical, Physical & Bio