Wideband high-Q nonlinear resonance for MEMS

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We examine high quality factor (Q) nonlinear wide- bandwidth resonance for microelectromechanical systems (MEMS) by mimicking high nonlinearity in stiffness by force feedback. The Q and bandwidth are usually thought of as being inversely proportional to each other for linear systems, where a large Q is achieved with a narrow bandwidth, and vice versa. However, by invoking a feedback force that mimics highly nonlinear stiffness, we demonstrate that it may be possible to achieve the behavioral benefits of both large amplitude and wide bandwidth. As a test case, we demonstrate how this concept may benefit devices that suffer from thermal drift or mode mismatch, such as MEMS vibratory gyros.

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Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 341 - 344
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-8-7