Compact Modeling of MEMS Contact Current upon Pull-In

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This work-in-progress presents a parameterizable compact model of a microelectromechanical system (MEMS) beam element that includes mechanical contact and electrical current flow upon gap closure. Quasistatic electromechanical simulation analyses include the initial onset of pull-in followed by an increase in surface contact as voltage and current continue to increase. The traditional beam element without contact is a key building block for many types of MEMS. However, by adding mechanical and electrical contact physics to the beam model, then the computationally-efficient design and simulation of many other types of MEMS that experience contact may be explored. Prior efforts by others include closed-form pull-in analytical models and simulations of pull-in and lift-off without electrical contact. We describe our compact model and simulate the characteristic behaviors of a simple gap-closing actuator and a zipper actuator with dimples.

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Journal: TechConnect Briefs
Volume: TechConnect Briefs 2019
Published: June 17, 2019
Pages: 345 - 348
Industry sector: Sensors, MEMS, Electronics
Topics: Nanoelectronics, Sensors - Chemical, Physical & Bio
ISBN: 978-0-9988782-8-7