Papers – Page 605 – TechConnect Briefs

Multiband THz detection and imaging devices

Popa-Simil I.L., Popa-Simil L., Popa-Simil I.L., Popa-Simil L., LAVM Llc., US

Terahertz imaging finds more and more applications in homeland security, medical, and life sciences applications. While THz sources and detection systems are gaining ground, the ability of electronics conversion systems to keep up with the [...]

Nano-gap high quality factor thin film SOI MEM resonators

Grogg D., Tekin C.H., Badila-Ciressan D.N., Tsamados D., Mazza M., Ionescu M.A., Ecole Polytechnique Fédérale de Lausanne, CH

A 1.25 m thin SOI micro-electro-mechanical (MEM) resonator with a quality factor of 100’000 at 24.6 MHz is demonstrated. A nanogap fabrication process allows the fabrication of < 200 nm gaps, allowing for low polarization [...]

10GHz Surface Acoustic Wave Filter Fabrication by UV Nano-Imprint

Chen H.J.H., Chen N.H., Chen H.J.H., Chen N.H., Lin C.H., Huang F.S., National Tsing Hua University, TW

Surface acoustic wave (SAW) devices have been widely implemented for wireless communications. Recently, SAW devices continue the upward trend in frequency for higher functionality. Nanoimpirnt can adequately offer mass production technique on interdigital transducer (IDT) [...]

Deposition of functional PZT films as actuators in MEMS devices by high rate sputtering

Quenzer H.-J., Dudde R., Jacobsen H., Wagner B., Föll H., Fraunhofer ISIT, DE

Crack and void free polycrystalline Lead Zirconate Titanate (PZT) films in the range of 5 µm to 10 µm have been successfully deposited on silicon substrates using a novel high rate gas flow sputtering process. [...]

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US

This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Sensing Weak Magnetic Field By Leaving Biosystems and A Magnetoreseption Mechanism For Navigation

Lyshevski S.E., Rochester Institute of Technology, US

This paper examines and demonstrates a possible mechanism of sensing weak magnetic fields in biosystems.

Development of Active Systems for Military Utilization

Zunino III J.L., Lim H.C., US Army ARDEC, US

The US Army is transforming into a lighter yet more lethal “objective force”, all while fighting wars in the Middle East. Therefore, advanced technologies and materials are being developed and integrated into current and future [...]

A 20 µm Movable Micro Mobile

Jeon J., Lee J.B., Kim M-J, The University of Texas at Dallas, US

We present design, fabrication, and characterization of an extremely small (20x14 µm) movable 3D micro vehicle. The micro mobile was fabricated using a combination of focused-ion-beam (FIB) for micro/nano parts production, atomic layer deposition (ALD) [...]

Microsystems on their Way to Smart Systems

Heinze L., VDI/VDE Innovation + Technik GmbH, DE

This paper will deal with two core questions: 1. The evolution of Microsystems towards Smart Systems. 2. How will the development of Smart Systems influence the future of Microsystems Technologies (MST)? Overall from the development [...]

Adaptive Subband Filtering Method for MEMS Accelerometer Noise Reduction

Pietrzak P., Pekoslawski B., Makowski M., Napieralski A., Technical University of Lodz, PL

The main factor that determines the cost of vibration-based condition monitoring system of large rotating machines is the unitary price of the piezoelectric sensors, commonly used in such devices. Silicon microaccelerometers can be considered as [...]