End Effects of Rare Gas Flow in Short Channels and in Squeezed-Film Dampers


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Simple approximate design formulas (+-5%) for calculating the elongation of the idealized viscous flow channel of rare gas at Knudsen numbers Kn < 100 due to the open end effects. Rectangular channels with a large aspect ratio and circular channels are discussed. The elongation model is applied to a squeezed-film damper problem and a simple design formula is presented that approximates the end effects in the damper.

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Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2002 International Conference on Modeling and Simulation of Microsystems
Published: April 22, 2002
Pages: 104 - 107
Industry sector: Sensors, MEMS, Electronics
Topic: Micro & Bio Fluidics, Lab-on-Chip
ISBN: 0-9708275-7-1