Veijola T.
Helsinki University of Technology, FI
Keywords: acoustic impedance, gas flow in microstructures, gas flow in rectangular channels, oscillating gas flow, slip flow
Acoustic impedance models for gas flow in rectangular channels are presented. The models include the effect of slightly rarefied gas (slip-flow region) and the fluid inertia effects. An equivalent circuit is presented that implements the acoustic impedance of a rectangular flow channel. Utilizing these models, acoustic impedance circuits can be constructed to model damping problems, such as the squeezed-film damping of fast oscillating microstructures with dimensions comparable to the mean free path.
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 96 - 99
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4