A Multiscale Model of Micro Cantilever Arrays

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Abstract:The presentation is a contribution in the area of MEMS Array modelling. In some cases, Arrayed Microsystems present coupling between their components, and their global simulation cannot be performed taking into account individual sub-systems separately. This renders computation unpracticable for large number of units. We encountered this difficulty when considering Arrays of Cantilevers which are, for instance, parts of Arrays of Atomic Force Microscopes. Through the presentation, we introduce a two-scale simplified model which overcomes this problem. First, the principle of its mathematical construction is shortly reviewed. Then, its structure and the strategy used for discretization is explained. Its validation through comparison with full simulations and through dedicated identification procedures is discussed. Finally, cross-talk effects quantified through model simulations are reported.

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Journal: TechConnect Briefs
Volume: 3, Nanotechnology 2009: Biofuels, Renewable Energy, Coatings, Fluidics and Compact Modeling
Published: May 3, 2009
Pages: 320 - 323
Industry sector: Advanced Materials & Manufacturing
Topics: Informatics, Modeling & Simulation
ISBN: 978-1-4398-1784-1