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Keywords: thermal

Synthesis of thermal interface material with high thermal conductivity for high efficacy of LED

Han C.J., Han J.-I., Yu S.H., Hong S-J, Kim Y-S, Han C.J., Han J.-I., Korean Electronics Technology Institute, KR
Thermal dissipation problem for LED is critical for high efficacy and reliability. Inorganic filled grease type thermal interface material (TIM) has widespread use for heat management of LED. Conventional TIM materials, however, has relative low [...]

Non traditional dicing of MEMS devices

Sullivan S., Yoshikawa T., DISCO Corp., JP
Dicing of MEMS contains a host of challenges. Contamination, vibration, thermal, and electrical sensitivity dictate modified or non traditional dicing processes. Focusing a laser beam inside of the silicon substrate creating a modified layer is [...]

Simulation of a Diamond-Based Bistable Thermal Microswitch

Schmid P., Hernandez-Guillen F.J., Kohn E., University of Ulm, DE
A novel bistable layout for a thermally driven microswitch based on polycrystalline diamond has been developed and evaluated by simulations. The device is based on a double-anchored, free standing diamond beam, which buckles due to [...]

Analysis of Temperature Effect on Diaphragm Resonant Sensors

Faris W., Virginia Polytechnic and State Univeristy, US
Resonant senosrs and microsensors are one of the most common used sensors in industry. The applications ranges from fuid, pressure to chemical sensing. Temperature effect on the performance of such devices is of importance to [...]

Thermal Stability Evaluation of MEMS Microactuator for Hard Disk Drive

Jianqiang M., Shixin C., Yi L., Boon Buan L., Data Storage Institute, SG
Advances in hard disk drives have created a need for MEMS actuator to achieve high bandwidth of tracking servo and fine positioning of magnetic head. Thermal stability under operational conditions is one of the critical [...]

Simulation of Aluminum Micro-mirrors for Space Applications at Cryogenic Temperatures

Kuhn J.L., Dutta S.B., Greenhouse M.A., Mott D.B., NASA/Goddard Space Flight Center, US
Closed form and finite element models are developed to predict the device response of aluminum electrostatic torsion micro-mirrors fabricated on silicon substrate for space applications at operating temperatures of 30K. Initially, closed form expressions for [...]

Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool

Briand D., Grétillat M.-A., van der Schoot B., de Rooij N.F., Institute of Microtechnology, CH
In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the [...]

Coupled Fluid-Thermal-Structural Simulations in Microvalves and Microchannels

Athavale M.M., Yang H.Q., Przekwas A.J., CFD Research Corporation, US
This paper presents the results of high-fidelity, 3-D simulations of coupled flow, heat-transfer and structural mechanics simulations of microchannels, micropumps, microvalves, and time-accurate simulations of a microoscillator. In each of these cases, the simulated results [...]

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