pressure sensor – TechConnect Briefs

Resistive Pressure Sensor with Carbon Nanotube Electrodes towards Flexible Electronics Applications

Palumbo A., Zhang R., Yan K., Yang E.H., Chen S., Hader G., Chang J., Yang E.H., Stevens Institute of Technology, US

Here, we present a flexible and stretchable pressure sensor composed of vertically aligned CNTs (VACNTs) partially embedded in a polydimethylsiloxane (PDMS) substrate. VACNTs were grown via chemical vapor deposition and transferred onto PDMS as a [...]

A Stretching/Bending-Insensitive Flexible Pressure Sensor with Carbon Nanotube-PDMS

Zhang R., Stevens Institute of Technology, US

Flexible pressure sensors have many successful applications in personal electronic devices, artificially intelligence, and industrial production applications [1]. Despite the good performance and high flexibility, the measurement of pressure under dynamic deformation has remained difficult [...]

A New Pressure Threshold Sensor Based on Nonlinear MEMS Oscillator

Alsaleem F., Hasan M.H., University of Nebraska Lincoln, US

Pressure sensing is one of the earliest applications of Micro-Electro-Mechanical-Systems MEMS. Changing the pressure sensing element (such as capacitive and optical) size to the microscale has created opportunities to reduce power consumption and production costs [...]

High Sensitivity MEMS Pressure Sensor

Juetten M., Iowa State University Research Foundation, US

Summary: ISU researchers have developed a high-sensitivity microelectromechanical system (MEMS), graphene-based pressure sensor that outperforms any existing MEMS-based small footprint pressure sensor. Description: ISU researchers have developed a microelectromechanical system (MEMS) graphene-based pressure sensor realized [...]

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE

With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]

Micro-Opto-Mechanical Pressure Sensor (MOMPS) in Sin Integrated Photonics Platform

Jansen R., Rochus V., Goyvaerts J., Vandenboch G., van de Voort B., Neutens P., O’Callaghan J., Tilmans H.A.C., Rottenberg X., IMEC, BE

This paper presents a Micro-Opto-Mechanical Pressure Sensor (MOMPS) manufactured in a SiN integrated photonic platform for short wavelength implementation. It implements a single wavelength Mach Zehnder Interferometer (MZI) system allowing a simple readout system. We [...]

MEMS pressure sensor with an AlGaN/GaN based high electron mobility transistor

Vanko G., Dzuba J., Rýger I., Vallo M., Institute of Electrical Engineering, SK

The III Nitrides (III-N), especially gallium nitride (GaN) and its compounds, are very attractive for pressure and strain sensing thanks to their excellent piezoelectric properties. The AlGaN/GaN heterostructure offers high mechanical and chemical stability, operation [...]

A Pressure Sensor Array with Sensing Ragnes Tunable by Drving Frequency

Lai Y.-T., Yang Y-J, National Taiwan University, TW

This work presents the development of a novel pressure sensing array which sensing ranges are tunable during operation. The sensing element consists of carbon nanotubes (CNT) dispersed in nematic liquid crystals composites. The sensing ranges [...]

Parallel Fabrication of Single-Walled Carbon Nanotube based Piezoresistive Pressure Sensors

Burg B.R., Helbling T., Hierold C., Poulikakos D., ETH Zürich, CH

A major obstacle in the realization of commercially viable single-walled carbon nanotube (SWNT) based devices, hindering the functionality of this uniquely interesting type of material, is their type and site selective integration. In this work, [...]

Monolithic CMOS MEMS technology development: A piezoresistive-sensors case study

Chaehoi A., Weiland D., O’Connell D., Bruckshaw S., Ray S., Begbie M., Institute for System Level Integration, UK

This paper presents the development of a monolithic CMOS-MEMS platform under the iDesign and SemeMEMS projects with the aim of jointly providing an open access “one-stop-shop” prototyping facility for integrated MEMS. This work addresses the [...]