microphone – TechConnect Briefs

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE

With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]

Nano-Electrodeposits of MEMS Directional Microphones for Hearing Aid Optimization

Je S.-S., Kim J., Kozicki M.N., Chae J., Arizona State University, US

We present an in-situ non-electronic method for MEMS (Micro-Electro-Mechanical-Systems) microphone optimization by sensitivity adjustment via the growth/retraction of nano-electrodeposits to achieve high directionality in hearing aid applications. Using a DC bias at room temperature, nano-electrodeposits [...]

A Novel Structure for PZT-Based Piezoelectric Microphone

Zhao H.J., Ren T.L., Liu J.S., Liu L.T., Liu J.S., Liu L.T., Li Z.J., Liu J.S., Liu L.T., Tsinghua University, CN

Microphone is one of the most challenging and developing areas and markets in the field of microsensor technology. Piezoelectric microphones have the advantages of simple fabrication process and easy to be integrated into semiconductor devices [...]