microaccelerometer – TechConnect Briefs

High Resolution Silicon Accelerometer Using Eutectic Bonding

Kwang Y., Yeon J.C., Kim Y.H., Rhee S.W., Oh S.H., Seoul National University, KR

High precision micro-accelerometers are used in many applications such as automotives, aviations and aerospace navigation systems. In this paper, a lateral capacitive micro-accelerometer with _g level resolution has been designed and fabricated using simple micromachining [...]

Generation of a Metamodel for a Micromachined Accelerometer using T-SpiceTM and the Iz-Optimality Option of I-OPTTM

Lee H.J., Crary S.B., Affour B, Bernstein D., Gianchandani Y.B., Woodcock D.M., Maher M.A., MEMSCAP S.A., FR

We demonstrate a new method for dynamical parametric simulation of MEMS using IZ-optimal designs for FEA simulations, fitting using the best linear unbiased predictor, and extraction of relevant coefficients for solution of the appropriate ODE [...]