MEMS – Page 33 – TechConnect Briefs

Mask-Layout Synthesis Through an Evolutionary Algorithm

Li H., Antonsson E.K., California Institute of Technology, US

An automatic method for synthesizing MEMS mask-lay-outs is presented. This method uses evolutionary algorithm techniques to optimize the mask-layouts for a forward simu-lation of fabrication. Initially, a random population of mask-layouts is generated. The fabrication [...]

The Art of Modeling Coupled-Field Effects in Microdevices and Microsystems

Wachutka G., Münich University of Technology, DE

The rapid progress in microsystems technology is increasingly supported by MEMS-specific modeling methodologies and dedicated simulation tools. These do not only allow the visualization of fabrication processes and operational principles, but they also assist the [...]

Design and Modelling of Optical Microsystems – An Approach to a User-Friendly System Integration Technique

Wächter C., Schreiber P., Karthe W., Elbers J-P, Glingener C., Voges E., Krabe D., Dümcke R., Reichl H., Hagner G., Schröter S., Bartelt H., Stock E.A., Bauer G., Schäfer W., Sickinger H., Schwider J., Fraunhofer-Institut fur Angewandte Optikund Feinmechanik, DE

Optical microsystems usually are of a hybrid nature. They consist of optical components. i.e.micro-optical and or integrated-optical ones, and additionally they include at least mechanical and packaging components. Therefore, a complete design process has to [...]

Dynamic Effects of Linkage Joints in Electrostatic Microengines

Allen J.J., Miller S.L., LaVigne G.F., Rodgers M.S., Eaton W.P., Sandia National Laboratories, US

The electrostatic microengine is one of the major actuators used in MEMS applications. To ensure this MEMS actuator is operated in a fashion that will produce peak performance and long life, the system dynamics must [...]

Micromachined Accelerometer Design, Modeling and Validation

Davies B.R., Bateman V.I., Brown F.A., Montague S., Murray J.R., Rey D., Smith J.H., Sandia National Laboratories, US

Micromachining technologies enable the development of low-cosr devices capable of sensing motion in a reliable and accurate manner. The development of various surface micromachined accelerometers and gyroscopes to sense motion is an ongoing activity at [...]

Computational Modeling of Microfluid Devices with Free Surface Liquid Handling

Yang H.Q., Przekwas A.J., CFD Research Corporation, US

Integrated Microfluidic Systems are the subject of great scientific and commercial interest for a wide range of applications, including the biomedical, environmental, automotive, aerospace, and defense. This paper presents the computational methodology used in the [...]

Thermal Simulation Tools for Microsystem Elements

Székely V., Rencz M., Páhi A., Poppe A., Hajder Sz., Technical University of Budapest, HU

Two different field solver tools have been developed in order ro facilitate fast thermal and electro-static simulation of microsystem elements. The pSTHERMANAL program is capable for the fast steadystate and dynamic simulation of suspended multilayered [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]

SEGS: On-line WWW Etch Simulator

Li G., Hubbard T., Antonsson E.K., Daltech-Dalhousie University, CA

This paper presents an interactive on-line wet etch simulator (SEGS) which predicts the etched shape as a function of time for arbitrary isotropic or anisotropic etchants and any initial mask shape. Using any Javaenabled web [...]

Systematic Design of Electrothermomechanical Microactuators using Topology Optimization

Sigmund O., Technical University of Denmark, DK

Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS [...]