MEMS devices – TechConnect Briefs

An Online Electrostatics Modeling Tool for Microdevices with Dirichlet Boundary Conditions by Schwarz-Christoffel Mapping

Li F., Clark J.V., Purdue University, US

We present an online software tool that quickly and accurately models and simulates the electrostatic properties, such as capacitance, charge distribution, and electrostatic force, of microdevices in 2.5D domain with Dirichlet boundary conditions by using [...]

Numerical Simulation of Micro Assembly Techniques in MEMS Devices

Finch N., Keating D., He Y., IntelliSense Corporation, US

This paper presents research on numerical simulation of the micro-assembly of MEMS devices. Recent developments in MEMS devices ñ making use of multiple deposition layers, micro-fabricated hinges, and actuators ñ have enabled fabrication of MEMS [...]