MEMS – TechConnect Briefs

A Piezoresistive MEMS Memory Device Using a Buckled Beam

Yang J.A., Shuvra P.D., Lin J-T., Walsh K., McNamara S., Alphenaar B., University of Texas at Austin, US

Microelectronics and microelectromechanical systems (MEMS) have given rise to a large class of new de- vices, from ultra-miniature sensors for cell phones and automobiles to complex memory devices for computers. Recent research in memory devices [...]

A New Concept for Humidity Sensing Using Curved Micro-beams

Ouakad H.M., Hasan M.H., Alsaleem F.M., University of Nebraska Lincoln, US

There are number of common humidity sensing methods in MEMS. They include capacitive, resistive, and thermal methods. Among these methods, capacitive sensing is considered the most common in MEMS. In this method, changes of a [...]

Multi-cantilever array sensor system with MOEMS read-out

Bieniek T., Instytut Technologii Elektronowej, PL

Cantilever beams-based sensor systems become a sensor family applicable in several high-end technology research areas. The outstanding sensitivity and phenomenon selectivity of such systems profits from functionalization technique available for cantilever beams surface. High selectivity [...]

A New Pressure Threshold Sensor Based on Nonlinear MEMS Oscillator

Alsaleem F., Hasan M.H., University of Nebraska Lincoln, US

Pressure sensing is one of the earliest applications of Micro-Electro-Mechanical-Systems MEMS. Changing the pressure sensing element (such as capacitive and optical) size to the microscale has created opportunities to reduce power consumption and production costs [...]

High Sensitivity MEMS Pressure Sensor

Juetten M., Iowa State University Research Foundation, US

Summary: ISU researchers have developed a high-sensitivity microelectromechanical system (MEMS), graphene-based pressure sensor that outperforms any existing MEMS-based small footprint pressure sensor. Description: ISU researchers have developed a microelectromechanical system (MEMS) graphene-based pressure sensor realized [...]

A new humidity sensor based on the effect of water content on a capacitive MEMS oscillator’s thermo-electrical characteristics

Alsaleem F., University of Nebraska Lincoln, US

Accurate humidity measurement is essential in commercial and industrial applications such as HVAC systems and microelectronics manufacturing. Typical humidity sensors suffer from degradation over time, consume a relatively high amount of power, and have limited [...]

MEMS Inertial Sensors for Cyber-Physical Systems: Trustworthy Sensing, Secure Communication, Data Fusion and Information Control

Herlihy L., Rochester Institute of Technology, US

This paper reports the experimental results for the inertial measurement units (IMUs). Consistent models are found. The documented findings and models can be used in the descriptive, predictive and prescriptive analyses. Our findings are substantiated [...]

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

Haouari R., Jansens R., Rochus V., Figeys B., Rottenberg X., Imec (Belgium) ; KU Leuven (Belgium), BE

With a trend towards a plethora of ‘smart’ devices, the MEMS microphone sector has maintained an exponential growth in recent years. For many applications microphones need to survive harsh environments or be bio-compatible. Micro-Opto-Mechanical-Pressure Sensor [...]

Freestanding Membranes of Cross-Linked Gold-Nanoparticles: Novel Functional Material for MEMS/NEMS Applications

Schlicke H., Schröter C.J., Rebber M., Battista D., Kunze S., Vossmeyer T., University of Hamburg, DE

We present the focus of our current research, which is the investigation of the electronic and mechanical properties of freestanding gold nanoparticle (GNP) membranes, e.g. by micro bulge tests with atomic force microscopy (AFM) data [...]

Tip-Tilt-Piston Micromirror with Integrated Large Range Variable Focus for Smart Lighting Systems

Morrison J., Imboden M., Little T.D.C., Bishop D.J., Boston University, US

Modern fabrication techniques are enabling the adoption of micro-opto-electromechanical systems devices in applications never anticipated. Low-cost lighting systems can exploit micromirrors to both enable directed or sculpted light and to support short-range optical communications. The [...]