electrostatic – TechConnect Briefs

3D Electrostatic Energy Harvester

Janicek V., Husak M., Formanek J., Jakovenko J., FEE CTU in Prague, CZ

This paper discusses the design, optimization, simulation and fabrication of 3D electrostatic MEMS energy harvester. It is one part of self-powered microsystem. It is able to work in all 3 axis which increases the efficiency. [...]

Study of the phenomenon of meniscus deformation and ejection by pulse voltage and frequency in drop-on-demand EHD printing

Son S., An K., Kim Y.J., Choi J., Lee S., Sungkyunkwan University, KR

EHD (electrohydrodynamics) printing has recently attracted attention for micro/nano size pattern devices due to it can make very small droplet than nozzle diameter and possibility of the use of various ink such as including metal, [...]

Modeling and Design of Electrostatic Voltage Sensors Based on Micromachined Torsional Actuators

Dittmer A., Dittmer J., Dittmer A., Dittmer J., Judaschke R., Büttgenbach S., Technische Universität Braunschweig, DE

The optimization of design parameters and methods for electrostatic voltage sensors based on torsional actuators is presented. The analytical software model used for this optimization process is discussed and compared to measurement results. Voltage excitation [...]

High-Stability Numerical Algorithm for the Simulation of Deformable Electrostatic MEMS Devices

Rottenberg X., Nauwelaers B., De Raedt W., Elata D., IMEC, BE

This paper presents a novel high-stability algorithm for the simulation of the electromechanical actuation of electrostatic MEMS devices. Its stability improves on that of voltage- and charge-drive algorithms. It further offers a purely electrical simulation [...]

Electrostatic Induced Inkjet Printing System for Micro Patterning and Drop-On-Demand Jetting Characteristics

Choi J., Kim Y., Kim Y.J., Son S.U., Kim Y., Kim Y.J., Lee S., Byun D., Ko H.S., Sungkyunkwan University, KR

Printing technology is considered to be a key technology even in the field of electronics, materials processing, and bio applications. Inkjet printing is an interesting patterning technique for electronic devices because it requires no physical [...]

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US

This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles

Hsu C-P, Shih C-T, Wen S-Y, Chien Y-H, Hu C-C, Lee H.W., Industrial Technology Research Institute, TW

Two new types of electrostatic grating light modulators (GLMs) are proposed, designed, and analyzed here for improvement on optical wavefront distortion. The proposed GLMs consist different microbeam structures with spring-like legs to improve the flatness [...]

Design Optimisation of an Electrostatic MEMS Actuator with Low Spring Constant for an “Atom Chip”

Rouabah H.A., Gollasch C.O., Kraft M., University of Southampton, UK

The advance of MEMS based sensors and microfabrication techniques has facilitated innovative technologies such as so-called ‘atom chips’, where a cloud of ultra cold atoms in a Bose Einstein Condensate (BEC) is controlled and manipulated [...]

Active Damping Control in MEMS Using Parametric Pumping

Gallacher B.J., Burdess J.S., Harris A.J., Harish K.M., Newcastle University, UK

This paper reports on an excitation scheme that enables control of the damping of an electrostatically actuated MEMS sensor through combined external forcing and parametric excitation. System damping is of fundamental importance in vibratory MEMS [...]

Electrostatic Droplet Ejector with Monolithic Fabrication of Nozzle

Lee S-H., Byun D.Y., Ko H.S., Kim Y., Yang J.H., Han S.J., Son S.U., Oh J.T., Konkuk University, KR

This paper presents a novel mechanism of electrostatic micro droplet formation and ejection of fluid. Unlike conventional electrostatic jetting which requires a high operating voltage, we offer a, commercially viable, low operating voltage for droplet-on-demand [...]