Experimental study on sheet resistivity and thickness measurement in Copper Electroplating

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Electroplated copper thin films have been extensively used for interconnections in semiconductor devices. In this paper, electroplating of copper has been investigated to study the dependency of plated film thickness, current efficiency and sheet resistivity [...]

Investigation of Metal Nano Layer Formation by the Tunneling Current through the Thin Oxide Film in the Electrolyte–Oxide–Silicon System

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In the researches on Electrolyte–Oxide–Silicon (EOS) system, tunneling current through the gate insulator has been considered as an undesirable factor causing reliability issues such as gate insulator degradation and interface state generation. In this work, [...]