electron beam lithography – TechConnect Briefs

Patterning of Periodic Structures Using Continuously Moving Stage

Klingfus J., Sanabia J.E., Burcham K.E., Kahl M., Raith USA, US

A unique EBL writing technique is presented which is ideally suited to patterns of a periodic nature such as gratings, holograms, photonic crystals, sieves, etc. In contrast to classic step-and-write EBL strategies, this technique writes [...]

Fabrication and Characterization of of Nanoscale Tellurium Fuses for Long Term Solid State Data Storage

Pearson A.C., Singh B., Linford M.R., Lunt B.M., Davis R.C., Brigham Young University, US

We have fabricated nanoscale tellurium fuses using electron beam lithography for long term data storage applications. The tellurium fuses contain a narrow resistive region(250 nm to 10 micron). Application of a sufficiently high voltage accross [...]

Fabrication and Recording of Bit Patterned Media Prepared by Rotary Stage Electron Beam Lithography

Moneck M.T., Lin W., Powell S., Okada T., Fujimori J., Kasuya T., Katsumura M., Iida T., Kuriyama K., Bain J., Zhu J.-G., Carnegie Mellon University, US

Bit patterned media (BPM) is a promising technology for magnetic recording at ultra-high areal densities beyond 1 Tbit/in2. To be viable, bit patterns must be reliably fabricated across 2.5” disks with few defects and sigma [...]

Ink-jet printed ZnO Nanoparticle Thin Films for Sensing Applications

Hartner S., Khalil A.S.G., Ali M., Winterer M., Wiggers H., University Duisburg-Essen, DE

Stable aqueous dispersions of ZnO NPs are successfully prepared with a new polymeric stabilizer. The dispersions are stable for at least 2 months without any observable sedimentation. The zeta potential and the size of the [...]

Fabrication of Bowtie Nano-Gap Structures by Electron Beam Lithography

Murali R., Walters E., Zaman F., Tabor C., Huang W., El-Sayed M., Meindl J.D., Georgia Tech, US

Metallic nano-particle pairs in close proximity to one another display surface-enhanced raman scattering (SERS). Single-molecule detection has been predicted to be possible thanks to SERS. The SERS enhancement is due an induced localized electric field [...]

Nanowire formation for Single Electron Transistor using SEM Based Electron Beam Lithography (EBL) Technique: Positive Tone Vs Negative Tone E-beam Resist

Nuzaihan M., Hashim U., Halim N.H.A., Bajuri S.N.M., Northern Malaysia University College of Engineering, MY

Experimental studies of nanowires formation are carried out. The nanowires are fabricated using Scanning Electron Microscope Based Electron Beam Lithography (EBL) Technique with critical dimensions in less than 100nm. In order to complete the design [...]

Fabrication of Periodic Sub-100nm Patterns in SiO2 Template by Electron-beam Lithography

Chen A., Chen P., Chua S.J., Chen A., Chen P., Singapore-MIT Alliance, National University of Singapore (NUS), SG

We report on the fabrication process of SiO2 templates with periodic sub-100nm air hole patterns using electron beam (e-beam) lithography followed by reactive ion etching (RIE). Two-dimensional periodic air holes with sub-100nm dimensions were defined [...]

Nanogaps for fabrication of Molecular Devices

Kabir M.S., Enokson P., Chalmers University of Technology, SE

The development of different alternative technologies to fabricate various types of nanoscale devices based on non-conventional materials such as molecules and clusters are here reported. We had two different approaches to fabricate nangaps though there [...]

Growth of Individual Vertically Aligned Nanotubes/Nanofibers with Small Diameter by PECVD on Different Metal Underlayers

Kabir M.S., Morjan R.E., Svensson K., Nerushev O.A., Lundgren P., Bengtsson S., Enokson P., Campbell E.E.B., Chalmers University of Technology, SE

The primary goal of this work is to achieve significant improvement of growth of carbon nanotubes (CNTs) on different metal underlayers that can provide a platform for electronic companies to adopt the technology into their [...]

Fabrication of Nanometer-Sized Structures by C-NEMS Technology

Ma K-S, Madou M., Jia G-Y, Xu Q., Zhou H., Wang C-L, Zoval J., Madou M., University of California Irvine, US

We have demonstrated a technique to fabricate carbon nano wires of controllable dimension and location using a top-down methodology. The width and thickness of the wires are in the tens of nanometer range. Additionally, the [...]