electromechanical – TechConnect Briefs

Electromechanical Model for a Single Port Nano-Mechancial Beam Resonator

Kemp T., Docker P.T., Ward M.C.L., Jones I.P., The University of Birmingham, UK

A simple electromechanical model for a nano-mechanical, magneto-motively driven beam resonator is derived. The model is developed in order to determine the dynamic electrical properties of the resonator. This enables the pickoff and drive electronics [...]

Automatic Generation of Small-Signal Dynamic Macromodels from 3-D Simulation

Ramaswamy D., White J.K., Massachusetts Institute of Technology, US

Recent algorithmic developments have greatly accelerated 3-D simulation of micromachined devices, but simulation and optimization of systems which use those devices require much more easily evaluated, yet still accurate, macromodels. In this paper we focus [...]

Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact

Chan E.K., Dutton R.W., Stanford University, US

The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed [...]

Complete Characterization of Electrostatically-Actuated Beams Including Effects of Multiple Discontinuities and Buckling

Chan E.K., Garikipati K., Dutton R.W., Stanford University, US

The entire process of calibrating an electromechanical simulator ñ identifying relevant parameters, designing and measuring test structures, extracting parameters using detailed electromechanical simulations, and extrapolating the behavior of an actual device ñ is presented. The [...]

A Mixed Rigid/Elastic Formulation for an Efficient Analysis of Electromechanical Systems

Ramaswamy D., Aluru N.R., White J.K., Massachusetts Institute of Technology, US

In this paper we describe both how to extract rigid bodies given an input file of elements, and how to efficiently construct and solve the rigid-elastic system of equations. Results are given to demonstrate that [...]