CVD – Page 2 – TechConnect Briefs

A Multiscale investigation of the influence of surface morphology on thin films CVD deposition

Barbato A., Rondanini M., Cavallotti C., Politecnico di Milano, IT

Growth rates and morphology of thin solid films deposited through Chemical Vapor Deposition processes are strongly dependent on chemical-physical events that occur at time and length scales differing by several orders of magnitudes. Models adopted [...]

Economic and Environmental Tradeoffs in SWNT Production

Healy M.L., Tanwani A., Isaacs J.A., Northeastern University, US

Assessment of economic and environmental attributes of nanomanufacturing during process development has significant potential to contribute to the quality and effectiveness of the processes, and will lead to development of competitive, safe and environmentally responsible [...]

CMOS Compatability of Carbon Nanotubes on SOI Devices

Haque M.S., Oei S.P., Teo K.B.K., Udrea F., Gardner J.W., Milne W.I., Cambridge University Engineering Department, UK

This paper reports for the first time PECVD and CVD growth of MWNTs both aligned and non aligned on high temperature partially depleted CMOS SOI substrates. We also report for the first time the growth [...]

Diameter controlled synthesis of carbon nanotubes by CVD using steric-stabilized iron nanoparticle catalysts

Mayya K.S., Lee S., Yeo I-S, Chung U-I, Moon J.T., Samsung Electronics Co.Ltd., KR

Carbon nanotubes (CNT) are the subject of intensive investigation due to their potential applications in nanoelectronics, biological sensors, high performance materials etc. CNTs can be synthesized using variety of techniques of which synthesis using chemical [...]

Centimetre-Long Carbon Nanotubes from Ethanol Decomposition

Zheng L.X., O'Connell M.J., Doorn S.K., Liao X.Z., Zhao Y.H., Hoffbauer M.A., Jia Q.X., Peterson D.E., Liu J., Zhu Y.T., Los Alamos National Lab, US

A simple method was found to grow 4 cm long CNTs, which will enable heigh-strength and light-weight materials in prictical applications. These long CNTs are almost defect-free along the entire length. giving a bright future [...]

Fabrication of Well-aligned and Mono-modal Germanium Dots on the Silicon Substrate with Trench-ridge Nano-structures

Chen P.S., Chen Y.J., Peng Y.H., Chen P.S., Chen Y.J., Kuan C.H., National Taiwan University, TW

Here we report the ability to fabricate well-aligned and mono-modal Ge dots on the silicon substrate with nano-trenches. It is started with electron beam lithography system (E-beam) to make patterns. Then reactive ion etching (RIE) [...]

Polymer Nanocoatings by Initiated Chemical Vapor Deposition (iCVD)

Gleason K.K., Pryce Lewis H.G., Chan K., Lau K.K.S., Mao Y., Massachusetts Institute of Technology, US

Initiated chemical vapor deposition (iCVD) is a novel process capable of producing a range of polymeric and multifunctional nanocoatings. Coatings can be made extremely thin (down to 10nm) on objects with dimensions in the nanometer [...]

Effects of the Process Parameters on the Carbon Nanotubes Growth by Thermal CVD

Verissimo C., Moshkalyov S.A., Ramos A.C.S., Gonçalves J.L., Alves O.L., Swart J.W., CCS - UNICAMP, BR

Carbon nanotubes growth was performed by thermal chemical vapor deposition using a tubular furnace and methane as carbon feedstock gas. Thin films of nickel were employed as catalysts supported onto a SiO2/Si substrate. The influence [...]

Feature Length-Scale Modeling of LPCVD and PECVD MEMS Fabrication Processes

Musson L.C., Ho P., Plimpton S.J., Schmidt R.C., Sandia National Laboratories, US

The surface micromachining processes used to manufacture MEMS devices and integrated circuits transpire at such small length scales and are sufficiently complex that theoretical analysis of them is particularly inviting. Under development at Sandia National [...]

Alignment Characteristic and Mechanism of Carbon Nanotubes Synthesized by Hot Filament Chemical Vapor Deposition in a CH4/H2 Plasma

Yang Q., Chen W., Singh A., Xiao C., Hirose A., University of Saskatchewan, CA

Controlling of the alignment of carbon nanotubes (CNTs) is very important for applications such as scanning probes, sensors, field emitters and nanoelectronics. Controlled growth of CNTs aligned at different angles to the substrate has been [...]