contact – TechConnect Briefs

Ultrafine Sensing Using Carbon Nanotube Arrays

Korach C.S., Cao C., Anger R., Chang S.-H., Kao I., Kukta R.V., Stony Brook University, US

Arrays of Carbon Nanotubes (CNTs) have shown the ability to react as foam-like structures and display local buckling within the bulk. The arrays, or turfs, are high aspect ratio CNT fibers that extend up to [...]

Increased Sensitivity of Carbon Nanotube Sensors by Forming Stable and Low Resistance CNT/metal Electrode

Jeon D., Park D., Lee S., Seoul National University, KR

We fabricated a rigid and low resistance contact for CNT by utilizing a eutectic mixture melting at low temperature as an electrode. The fabrication was done by depositing a eutectic Au/Al thin film on the [...]

Nanocomposite Contact Material for MEMS Switches

Ding C., MacDonald N.C., university of california, santa barbara, US

This work reports the development of a nanostructured composite contact material for improving the contact reliability of MEMS switches. The nanocomposite material was integrated into a bulk titanium MEMS (BT-MEMS) switch which was fabricated using [...]

The static behavior of RF MEMS capacitive switches in contact

Suy H.M.R., Herfst R.W., Steeneken P.G., Stulemeijer J., Bielen J.A., NXP Semiconductors Research, NL

A method is presented in which surface topography characterization is combined with the electrical measurement of the contact mechanics under electrostatic loading. Contact characteristics such as the surface separation versus the applied pressure, and the [...]

Ultra High performance In-line Contact MEMS RF Switch

Hong Y-T, Kim C-H, Lee S-H., Kwon S-W, Song I-S, Samsung Advanced Institute of Technology, KR

An in-line direct RF MEMS Switch was presented in this paper. This switch having single contact point was fabricated, and characterized. The switch is a series type and is actuated by a supportive membrane. A [...]

Effects of Surface Properties on the Effective Electrical Gap of Microelectromechanical Devices Operating in Contact

Chan E.K., Dutton R.W., Stanford University, US

The effective electrical gap between two conducting surfaces sandwiching a thin dielectric layer varies with applied voltage and pressure. Improved methods for measuring and modeling this variation are presented. Optical surface profile measurements of fixed-fixed [...]

Characterization of Electrostatically-Actuated Beams Through Capacitance-Voltage Measurements and Simulations

Chan E.K., Garikipati K., Hsiau Z-K, Dutton R.W., Stanford University, US

Detailed 2D electromechanical simulations of electrostatically-actuated beams reveal phenomena not captured by 1D or quasi-2D simulations. The behavior of the beam when in contact with a dielectric layer is studied. Capacitance-voltage measurements are used to [...]