Process Modeling Based on Atomistic Understanding for State of the Art CMOS Device Design
Chakravarthi S., Diebel M., Chidambaram P.R., Ekbote S., Dunham S.T., Machala C.F., Johnson S., Texas Instruments, US
Atomistic modeling methods are emerging as a powerful tool to understand the physical behavior of complex systems. However, continuum process simulators are the core of state of the art TCAD simulators and substantial challenges must [...]