Nanoporous thin film fabrication via magnetron sputtering and O2 plasma ashing process
Han S.H., Jang S.W., Hwang S., Hwang S.H., Hwang S., Hwang S.H., Korea Institute of Science and Technology, KR
We report a new method of fabricating nanoporous catalytic thin films. In the first step, metal–carbon thin films were prepared by reactive magnetron sputtering, using various metallic targets (Au, Ag, Pt, Cu, Ni, Ti) as [...]