CAD – Page 2 – TechConnect Briefs

3D MEMS Design via Matlab Interactive Plots

Lo N.R., Pister K.S.J., University of California, US

Matlab is utilized for 3D MEMS design. A preprocessor, written in C, processes the standard, 2D CIF design by applying the topology and spatial information to the design. The Mat3d toolkit then takes the output [...]

Design, Fabrication and Experimental-Numerical Study of PZT Sensors

Arik M., Zurnx S.M., Yigit K.S., Bar-Cohen A., University of Minnesota, US

MEMS micropumps, based on PZT membranes have been designed and fabricated at the Microtechnology Laboratory of the University of Minnesota for use in fluid flow control, and as chemical and pressure sensors. Design, fabrication and [...]

Layout Synthesis of CMOS MEMS Accelerometers

Gupta V., Mukherjee T., Carnegie Mellon University, US

An optimal layout synthesis methodology for CMOS MEMS accelerometers is presented. It consists of a parame-trized layout generator that optimizes design objectives while meeting functional specifications. The behavior of the device is estimated using lumped [...]

Parameterized Electrostatic Gap Model for Structured Design of Microelectroelectrical Systems

Lu M.S., Fedder G.K., Carnegie Mellon University, US

VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication [...]

Partial-Element Equivalent-Circuit Model Simulation for Designing RF-Wireless Communication Products with Embedded Passive Components

Smith W.R., National Semiconductor Corporation, US

Rapidly increasing functionality and performance of RF/wireless communication products, along with mandated decreases in size, weight, and cost, have created a critical need to replace discrete, surface-mounted passive circuit components with embedded passives in substrate [...]

A Technique for Extraction of Macro-Models in System Level Simulation of Inertial Electro-Mechanical Micro-Systems

Zaman M.H., Bart S.F., Rabinovich V.L., Ghaddar C.K., Tchertkov I., Gilbert J.R., Microcosm Technologies, Inc., US

This paper presents a comprehensive CAD environment for MEMS/MST design. The design flow includes MEMS mechanical schematic entry, parameterized cell layout generation, LVS style error checking, lumped parameter macro-model generation, and system level modeling of [...]

Robust Design of Silicon Piezoresistive Pressure Sensors

Shing T-K, Industrial Technology Research Institute, TW

In order to analyze silicon piezoresistive pressure sensors, several methods are used to obtain the stress distribution for different sizes and config,urations of square diaphragm type silicon pressure sensors. Furthermore, through integral considerations and thoughtful [...]

Multi-Mode Sensitive Layout Synthesis of Microresonators

Iyer S., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

Microresonator layouts are synthesized such that their preferred mode of oscillation is well-separated from the higher order in-plane and out-of-plane modes. Building on our previous work, we have incorporated models for four out-of-plane modes. All [...]

An Environment for MEMS Design and Verification

Bart S.F., Swart N.R., Mariappan M., Zaman M.H., Gilbert J.R., Microcosm Technologies, Inc., US

A comprehensive CAD software environment is presented for MEMS/MST design. It includes MEMS mechanical schematic entry, parameterized cell layout generation, automatic lumped parameter macro-model generation, and LVS style error checking. These tools allow for flexible [...]